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EBARA EV-S100P - User Manual

EBARA EV-S100P
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • D
    Donna HillAug 30, 2025
    What does 'WARN: CASING TEMP HIGH' mean on my EBARA Water Pump?
    • G
      George CrawfordAug 31, 2025
      If your EBARA Water Pump displays 'WARN: CASING TEMP HIGH', it could be due to a rise in pump back pressure, an increase in the gas load, accumulation of by-product, or reduced cooling water flow. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, or increase cooling water flow.
  • R
    Ronald BradyAug 29, 2025
    Why does nothing appear on the LCD of my EBARA EV-S100P?
    • S
      summersrickyAug 29, 2025
      If the LCD on your EBARA Water Pump shows nothing, it could be due to several reasons. First, check the power supply to ensure the pump is receiving power. Next, verify that the connector is properly connected. Also, make sure the CP is turned ON. Check the LCD’s connector to ensure that it is connected. If none of these steps resolve the issue, the instrument may have failed and need replacement.
  • V
    Victor StevensAug 28, 2025
    What causes 'ALARM: CASING TEMP H.HIGH' on my EBARA EV-S100P Water Pump?
    • D
      diane01Aug 28, 2025
      If your EBARA Water Pump displays 'ALARM: CASING TEMP H.HIGH', the pump back pressure may be rising, there may be an increase in the gas load, cooling water flow may be reduced, or there may be an accumulation of by-products. Check the exhaust pipe, reduce the inflow gas amount, cool the pump thoroughly and reset it, or replace or overhaul the pump.
  • D
    Dr. Timothy SchwartzAug 27, 2025
    What does 'WARN: WATER FLOW LOW' mean on my EBARA EV-S100P and how do I fix it?
    • K
      Keith PowellAug 27, 2025
      If the EBARA Water Pump displays 'WARN: WATER FLOW LOW', it could be due to several reasons: * Coupler is disconnected, so connect it. * Pressure is insufficient, so apply sufficient pressure. * Root valve is closed, so open the valve. * Water pipe is clogged, so clean or replace the piping. * Tube fittings are loosened, so re-tighten them. * Instrument failure, so replace the instrument. * Outlet & inlet pipes are reversed, so connect the pipes correctly.
  • L
    Lucas LopezAug 27, 2025
    Why is my EBARA Water Pump making abnormal noises and vibrating excessively?
    • R
      randersenAug 27, 2025
      If your EBARA Water Pump is experiencing abnormal noise and excessive vibration, here are a few possible causes: * The adjustment feet may not be applied, so use them. * Some object might be making contact with the outer cover, so remove it. * The fastening screws of the outer cover may have worked themselves loose, so tighten them. * Parts of the pump may be damaged, requiring you to replace or overhaul the pump.
  • B
    Bruce EvansAug 25, 2025
    What to do if EBARA EV-S100P Water Pump shows ALARM: WATER FLOW LOW?
    • M
      Mark SheltonAug 26, 2025
      If the EBARA Water Pump displays 'ALARM: WATER FLOW LOW', several issues could be the cause. It might be that the coupler is disconnected, the pressure isn't sufficient, the root valve is closed, the water pipe is clogged, tube fittings are loosened, there's an instrument failure, or the outlet and inlet pipes are reversed. To resolve this: * Connect the coupler if disconnected. * Apply sufficient pressure. * Open the valve if it's closed. * Clean or replace the piping if clogged. * Re-tighten any loose tube fittings. * Replace the instrument if there is an instrument failure. * Connect pipes correctly if they are reversed.
  • S
    Scott BowmanAug 25, 2025
    Why is the circuit protector activated on my EBARA EV-S100P Water Pump?
    • R
      rcolonAug 25, 2025
      If the circuit protector is activated on your EBARA Water Pump, it could be due to incorrect wiring or a short circuit. Check the wiring first. If that's not the problem, the pump may have a short circuit, requiring replacement or overhaul.

Summary

Safety Information

Hazard Level Definitions

Defines hazard levels (DANGER, WARNING, CAUTION) and notes for safe handling.

Important Prior Warnings

Safety Warning Labels

Hazardous Voltage Warning

Warns about risks of electric shock, burn, or death from hazardous voltage.

Hazardous Materials Warning

Warns about hazardous materials, spontaneous fire, explosion, and poisoning risks.

Safety Interlocks

Control System and Warnings

Residual Energy Release

3.4.1 Electrical Power Lockout;Tagout

Detailed procedure for locking out electrical power to ensure safety during maintenance.

3.4.2 Cooling Water Disconnection

Steps for safely disconnecting and draining the cooling water supply.

3.4.3 Nitrogen (N2) Disconnection

Steps for safely disconnecting the nitrogen gas supply and depressurizing.

Detailed Specifications

3.5.2 Model Specifications (EV-S20)

Presents detailed specifications for EV-S20, EV-S20P, and EV-S20N models.

3.5.2 Model Specifications (EV-S50)

Presents detailed specifications for EV-S50, EV-S50P, and EV-S50N models.

3.5.2 Model Specifications (EV-S100)

Presents detailed specifications for EV-S100, EV-S100P, and EV-S100N models.

3.5.2 Model Specifications (EV-S200)

Presents detailed specifications for EV-S200, EV-S200P, and EV-S200N models.

3.5.4 Performance Curve (EV-S20)

Presents performance curves for EV-S20, EV-S20P, and EV-S20N models.

4. Installation

4.2 Piping Connections

4.3 Electrical Wiring

4.3.1 Power Supply Wiring

Shows connector positions and wiring details for power supply and control signals.

4.3.2 Control Signal Wiring

Details on connecting control wires for remote operation and monitoring.

4.3.3 Emergency Stop Switch Box (Optional)

Explains the function and system flow of the optional Emergency Stop Switch Box.

Safety Interlock and Option Power

4.4 Safety Interlock Connector (EXT.IL)

Details the EXT.IL connector for hard interlock signal output as final safety protection.

5. LCD Controller

5.2 LCD Indication

Details on the information displayed on the LCD controller for pump status.

5.3 Operational Mode Settings

Guide to setting operational modes like control, running, and speed via the LCD controller.

5.4 Dip Switch Settings

6. Operation

6.1 Before Starting Checks

Essential checks before starting the pump, including water and N2 gas supply.

6.2 START;STOP Procedures

Details on starting and stopping the pump via local, remote, and communication interfaces.

7. Maintenance and Inspection

7.4 Lubricating Oil Management

Instructions for checking and supplying lubricating oil to the pump.

8. Disconnection and Transportation

10. Troubleshooting

10.1 Basic Troubleshooting

Common basic troubleshooting steps for pump start-up and operational issues.

10.2 WARNING Troubleshooting

Troubleshooting guide for WARNING messages displayed on the LCD controller.

10.3 ALARM Troubleshooting

Troubleshooting guide for ALARM messages displayed on the LCD controller.

10.4 Optional Troubleshooting

Troubleshooting for optional features and specific alarm conditions.

EBARA EV-S100P Specifications

General IconGeneral
BrandEBARA
ModelEV-S100P
CategoryWater Pump
LanguageEnglish

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