EBARA EV-S100P - 10.1 Basic Troubleshooting

P.91
10.1 Troubleshooting (1) Basic trouble
Abnormal symptom
Check Item
Corrective Action
Circuit Protector is
activated.
Incorrect wiring
Check wiring.
Short circuit
Replace or overhaul pump.
Nothing appears on LCD
No power supply to pump.
Check power supply.
Connector is not connected.
Connect power connector.
CP is not ON.
Place CP to ON.
Disconnection of the LCD’s connector
Connect LCD’s connector
Instrument failure
Replace instruments.
MP does not start when
applying START button.
“Remote” or “COM” mode has been
selected.
Set switch to “Local” mode.
Start-up conditions are not satisfied.
(“Startfail” is displayed.)
Satisfy all start-up conditions.
Instrument failure
Replace instruments.
MP does not start when
entering external “MP start”
signal input.
“Local” or “COM” mode has been
selected.
Set switch to “Remote”.
Start-up conditions are not satisfied.
(“Startfail” is displayed.)
Satisfy all start-up conditions.
Instrument failure
Replace instruments.
BP does not start.
BP start signal is not entered in
“REMOTE” or “COM” mode.
Enter the start signal.
Instrument failure
Replace Instruments.
Abnormal noise
Excessive vibration
Adjustment feet are not applied.
Use the adjustment feet.
Some object is making contact with the
outer cover.
Remove the object.
The fastening screws of the outer cover
have worked themselves loose.
Tighten the fastening screws.
Parts of the pump are damaged.
Replace or overhaul pump.
Vacuum pressure increase.
Accumulation of by-products in pipes.
Clean piping.
N2 pressure setting is high.
Set pressure for correct value.
Leak from vacuum piping.
Check piping.
Accumulation of by-products in pumps.
Replace or overhaul pump.
**MEMORY ERROR** is
displayed on LCD after
activating CP or changing
the dip switch setting.
None
Need “Countermeasure against
electric Noise” to pump.
PM10U
EBARA
CORPORATION