EBARA EV-S100P - Safety Interlock and Option Power; 4.4 Safety Interlock Connector (EXT.IL)

P.55
4.4 Safety interlock Connector (Connector EXT.IL)
Hard interlock signal is output as the final safety protection byEXT.IL connector.
Please intercept the power supply of the pump when Hard interlock signal is open.
(see 9. For SEMI S2 standard)
plug HIROSE DF1B-2EP-2.5RC
Plug Pin
(Suitable wire size)
HIROSE DF1B2022PCB
(UL1007 AWG#20-22)
4.5 Power Supply for the Options (Connector CN-C)
This Power Supply is used for the options listed below and should not be used for other
purposes.
For example:
ADAPTER for Central Monitoring System
Interface Controller
DANGER Power Supply for the options is kept applying voltage during the pump is
supplied the power.
WARNING Do not use the power supply for other purposes.
PM10U
EBARA
CORPORATION