P.54
(3) Operation control
・ Push EMS Button to stop dry pump
Push red EMS button (Alternate)
Motor Driver output is turned off and pump stops
6-19 pin at Dsub-25 pins (CN-Y) Connector : Close → Open
(See Figure 4.7 and Table 4.8)
The following alarm is shown on LCD controller.
・ Release EMS
Check that pump can be operated and turn the button head to release lock.
Press the RESET button on the LCD controller, the pump to lift the
status of the ALARM.
(4) Example of System Flow diagram for EMO (Emergency OFF)
This EMS switch can also work as Emergency Off (EMO, Hardware
interlock to shut off the pump power supply) with additional components to
be prepared by users.
Fig. 4.9 Example, EMO System Flow
ALARM:
To Next Page
Loading...
