P.92
10.2 Troubleshooting (2) WARNING
Pressure is not sufficient.
Apply sufficient pressure.
Tube fittings are loosened.
Outlet & inlet pipes are
reverse. (flow value 0 L/min)
N2 port is not connected.
Primary pressure is
insufficient.
Apply sufficient pressure.
Regulator setting value
LOW.
Increase pressure setting.
Pump back pressure rises.
Increase of the gas load.
Reduce the inflow gas
amount.
Accumulation of by-product
Replace or overhaul pump.
Cooling water flow is
reduced.
Increase cooling water flow.
motor coil temp. rises.
Main pump (MP)
Cooling water flow is
reduced.
Cool pump thoroughly and
reset.
Replace or overhaul pump.
TEMP HIGH ####
WARN: MP DRIVER
TEMP HIGH ####
driver temp. rises.
Main pump (MP)
driver temp. rises.
Increase cooling water flow.
Connection error of the
instrumented units
Check the connection of the
instrumented unit.
Cooling water flow is
reduced.
Increase cooling water flow.
The ambient temperature is
Confirm the ambient
temperature (less than 30
Close N2 valve.
(at the side of pump)
After you have taken the remedial actions above, reset the pump. If the problem that has caused the
WARNING signal still remains, the WARNING display will appear again even after you have reset.
PM10U
EBARA
CORPORATION