P.45
4.3 Electrical Wiring
WARNING Be sure to keep the power supply to the pump turned off and
lock-outed until you have finished the wiring and connecting
work. Also interrupt the Circuit Protector (CP) during this.
WARNING Electrical wiring shall be carried out only by qualified electricians.
CAUTION Do not apply the power supply from the pump's power pack to
any other equipment as this will result in malfunctioning of the
control units and in pump failure.
CAUTION CB is not installed in the pump unit. Please install CB based on
the law and the standard in the installation region. (Please attach
the Circuit breaker(CB) type of UL489 to SEMI correspondence.)
CAUTION Do not supply a power supply to other instruments out of a pump
package. It becomes an operation mistake of a control part, and
a cause of pump failure.
PM10U
EBARA
CORPORATION
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