P.82
WARNING Be sure to check for gas leaks after you have finished pipe
maintenance work. Leaks will cause serious danger due to the
discharge of harmful and hazardous substances and the
occurrence of unpredictable reactions associated with the
admission of air into the pump. When checking for gas leaks by
pressurization, please pressurize by less than 0.05 MPa into the
purge port and do check.
Be sure to following the instructions below when carrying out maintenance work
on the vacuum and exhaust piping of the pump.
(1) Before you remove and wash the piping be sure to purge with a sufficient
volume of N
2
gas.
(2) When an exhaust gas scrubber unit is used, close the inlet valve of the
exhaust gas scrubber after the N2 gas purge has been discontinued and then
remove the piping.
(3) Be sure to switch off the power supply.
(4) After you have washed the piping do not reconnect until it has dried
completely.
PM10U
EBARA
CORPORATION
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