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EBARA EV-S100P - User Manual

EBARA EV-S100P
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • E
    Elizabeth HenrySep 12, 2025
    What does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA Water Pump?
    • S
      stephanie96Sep 12, 2025
      If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
  • C
    carmen02Sep 9, 2025
    What does 'ALARM: PHASE ERROR' mean on my EBARA EV-S100P Water Pump?
    • P
      Pamela WilliamsSep 10, 2025
      If you're seeing 'ALARM: PHASE ERROR' on your EBARA Water Pump, it could be due to an open phase or incorrect wiring. Replace the instrument or check the power supply.
  • V
    veronicalawsonSep 8, 2025
    What does 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###' mean on my EBARA Water Pump?
    • G
      Gary AvilaSep 8, 2025
      If your EBARA Water Pump displays 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, the cooling water flow rate may be reduced or the motor driver has broken down. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, cool the pump thoroughly and reset, or replace the motor driver.
  • M
    Mark VillaSep 7, 2025
    What does 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT' mean on my EBARA EV-S100P?
    • G
      Glenn HobbsSep 7, 2025
      If your EBARA Water Pump displays 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
  • N
    Natalie ChristensenAug 23, 2025
    What to do if my EBARA EV-S100P Water Pump shows 'ALARM: EMERGENCY STOP'?
    • M
      Matthew SilvaAug 23, 2025
      If the EBARA Water Pump displays 'ALARM: EMERGENCY STOP', it's likely due to the emergency stop switch being activated. Ensure the pump can be operated and turn the button head to release the lock.
  • M
    Megan WilliamsSep 5, 2025
    What does 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2' mean on my EBARA Water Pump?
    • L
      Lisa SkinnerSep 5, 2025
      If your EBARA Water Pump displays 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe & silencer, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
  • W
    wjohnsonSep 4, 2025
    What to do if my EBARA EV-S100P Water Pump MP does not start when entering external “MP start” signal input?
    • E
      elizabethalexanderSep 4, 2025
      If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
  • K
    Kimberly BaldwinSep 3, 2025
    What does 'WARN: PUMP N2 FLOW LOW' mean on my EBARA EV-S100P Water Pump?
    • J
      John GriffinSep 3, 2025
      If your EBARA Water Pump displays 'WARN: PUMP N2 FLOW LOW', it could be due to several reasons: the N2 port is not connected, the primary pressure is insufficient, the regulator setting value is too low, the N2 pipe is clogged or there are leaks on N2 pipe, or there is an instrument failure. Connect the N2 pipe fitting, apply sufficient pressure, increase the pressure setting, replace the N2 piping, check the fittings, or replace the instrument.
  • J
    Jose WilliamsSep 2, 2025
    What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA Water Pump?
    • R
      Ricky CollinsSep 2, 2025
      If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.
  • G
    gardnerdawnAug 31, 2025
    What to do if my EBARA EV-S100P MP does not start when applying START button?
    • T
      Thomas CrawfordAug 31, 2025
      If the MP (Main Pump) on your EBARA Water Pump doesn't start when you press the START button, it might be because “Remote” or “COM” mode has been selected or start-up conditions are not satisfied. Alternatively, there could be an instrument failure. Set the switch to “Local” mode or satisfy all start-up conditions. If the problem persists, replace the instruments.

Summary

Safety Information

Hazard Level Definitions

Defines hazard levels (DANGER, WARNING, CAUTION) and notes for safe handling.

Important Prior Warnings

Safety Warning Labels

Hazardous Voltage Warning

Warns about risks of electric shock, burn, or death from hazardous voltage.

Hazardous Materials Warning

Warns about hazardous materials, spontaneous fire, explosion, and poisoning risks.

Safety Interlocks

Control System and Warnings

Residual Energy Release

3.4.1 Electrical Power Lockout;Tagout

Detailed procedure for locking out electrical power to ensure safety during maintenance.

3.4.2 Cooling Water Disconnection

Steps for safely disconnecting and draining the cooling water supply.

3.4.3 Nitrogen (N2) Disconnection

Steps for safely disconnecting the nitrogen gas supply and depressurizing.

Detailed Specifications

3.5.2 Model Specifications (EV-S20)

Presents detailed specifications for EV-S20, EV-S20P, and EV-S20N models.

3.5.2 Model Specifications (EV-S50)

Presents detailed specifications for EV-S50, EV-S50P, and EV-S50N models.

3.5.2 Model Specifications (EV-S100)

Presents detailed specifications for EV-S100, EV-S100P, and EV-S100N models.

3.5.2 Model Specifications (EV-S200)

Presents detailed specifications for EV-S200, EV-S200P, and EV-S200N models.

3.5.4 Performance Curve (EV-S20)

Presents performance curves for EV-S20, EV-S20P, and EV-S20N models.

4. Installation

4.2 Piping Connections

4.3 Electrical Wiring

4.3.1 Power Supply Wiring

Shows connector positions and wiring details for power supply and control signals.

4.3.2 Control Signal Wiring

Details on connecting control wires for remote operation and monitoring.

4.3.3 Emergency Stop Switch Box (Optional)

Explains the function and system flow of the optional Emergency Stop Switch Box.

Safety Interlock and Option Power

4.4 Safety Interlock Connector (EXT.IL)

Details the EXT.IL connector for hard interlock signal output as final safety protection.

5. LCD Controller

5.2 LCD Indication

Details on the information displayed on the LCD controller for pump status.

5.3 Operational Mode Settings

Guide to setting operational modes like control, running, and speed via the LCD controller.

5.4 Dip Switch Settings

6. Operation

6.1 Before Starting Checks

Essential checks before starting the pump, including water and N2 gas supply.

6.2 START;STOP Procedures

Details on starting and stopping the pump via local, remote, and communication interfaces.

7. Maintenance and Inspection

7.4 Lubricating Oil Management

Instructions for checking and supplying lubricating oil to the pump.

8. Disconnection and Transportation

10. Troubleshooting

10.1 Basic Troubleshooting

Common basic troubleshooting steps for pump start-up and operational issues.

10.2 WARNING Troubleshooting

Troubleshooting guide for WARNING messages displayed on the LCD controller.

10.3 ALARM Troubleshooting

Troubleshooting guide for ALARM messages displayed on the LCD controller.

10.4 Optional Troubleshooting

Troubleshooting for optional features and specific alarm conditions.

EBARA EV-S100P Specifications

General IconGeneral
BrandEBARA
ModelEV-S100P
CategoryWater Pump
LanguageEnglish

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