EBARA EV-S50 - Setting the Rotational Speed in the S. ENERGY Mode; Setting the Pump N2 Flow Low Warning Threshold

P.65
5.3.5 Setting the rotational speed in the S. ENERGY mode
Use the up and down arrow keys to change the setting value.
△ : Increase the setting speed by 0.1 kmin
-1
.
▽ : Decrease the setting speed by 0.1 kmin
-1
Upper limit MP/BP : The value lower than the set value for the rated speed
Lower limit MP/BP : 1.0 kmin
-1
5.3.6 Setting the pump N2 flow low warning threshold
Use the up and down arrow keys to change the setting value.
△ : Increase the setting speed by 0.1 Pam
3
/s (Delay time：1 sec)
▽ : Decrease the setting speed by 0.1 Pam
3
/s (Delay time：1 sec)
Upper limit : 81.0 Pam
3
/s (Delay time：60 sec)
Lower limit : 0.5Pam
3
/s (Delay time：5 sec)
S
．
ENER GY SPEED
MP #
．
# kmin
-1
SET
S ． ENERGY SPEED?
PRG.
ENTER
ENTER
SET MP
S
．
ENERGY SPEED?
Setting
done
ENTER
Use the keys, ”▲” and ”▼” to set.
▽
△
S
．
ENERGY SPEED
BP #
．
# kmin
-1
ENTER
SET BP
S
．
ENERGY SPEED?
Setting
done
ENTER
Use the keys, ”▲” and ”▼” to set.
△
▽
Use the keys, ”▲” and ”▼” to set.
SET POINT
PUMP N2 WARNING?
PRG.
▽
△
N2 FLOW LOW DLY
## sec
ENTER
SET POINT
PUMP N2 FLOW DLY?
Setting
done
ENTER
N2 FLOW LOW
#
．
# Pam3/s
ENTER
SET POINT
PUMP N2 FLOW LOW?
Setting
done
ENTER
△
▽
PM10U
EBARA
CORPORATION