P.93
10.3 Troubleshooting (3) ALARM
Pressure is not sufficient.
Apply sufficient pressure.
Tube fittings are loosened.
Increase of the gas load.
Reduce the inflow gas amount.
Cooling water flow is
reduced.
Cool pump thoroughly and
reset.
Accumulation of
by-products
Replace or overhaul pump.
TEMP H.HIGH
ALARM:MP MOTOR
motor coil temp. rises.
Main Pump (MP)
Cooling water flow is
reduced.
Cool pump thoroughly and
reset.
Replace or overhaul pump.
OVERLOAD 2
ALARM:MP MOTOR
OVERLOAD 2
rises.
MP motor current
rises.
Check exhaust pipe & silencer.
Increase of the gas load.
Reduce the inflow gas amount.
(Accumulation of
by-products)
Replace or overhaul pump.
STEP OUT
ALARM:MP MOTOR
STEP OUT
motor step out.
Main Pump (MP)
motor step out.
Can not restart.
Increase of the gas load.
Reduce the inflow gas amount.
(Accumulation of
by-products)
Replace or overhaul pump.
BP DRIVER ###
ALARM:
MP DRIVER ###
protection
MP Motor driver
protection
Can not restart
Increase of the gas load.
Reduce the inflow gas amount.
(Accumulation of
by-products)
Replace or overhaul pump.
Cooling water flow rate is
reduced.
Cool pump thoroughly and
reset.
Motor driver has broken
down.
Starting during
WARNING/ALARM status
Make sure that all starting
conditions are met.
After you have taken the remedial actions above, reset the pump. If the problem that has caused the
WARNING signal still remains, the WARNING display will appear again even after you have reset.
PM10U
EBARA
CORPORATION