EBARA EV-S50 - 10.4 Troubleshooting (4) Option

P.94
10.4 Troubleshooting (4) Option
Display
Symptom
Check Item
Corrective Action
ALARM:
WATER LEAKAGE
Water leakage
Tube fittings are loosened.
Re-tighten.
Instrument failure
Replace instrument.
ALARM :
BACK PRESS.HIGH
Exhaust pressure
rises.
Exhaust valve is closed.
Check exhaust pipe.
Accumulation of
by-products in pipes.
Check exhaust pipe.
Instruments failure
Replace instruments.
WARN:
PRESS.HIGH ##.#
Exhaust pressure
rises.
Exhaust valve is closed.
Check exhaust pipe.
Accumulation of
by-products in pipes.
Check exhaust pipe.
Instruments failure
Replace instruments.
ALARM:
EMERGENCY STOP
Emergency Stop
switch
Stop by emergency Stop
button.
Check that pump can be
operated and turn the
button head to release
lock.
After you have taken the remedial actions above, reset the pump. If the problem that has caused the
ALARM signal still remains, the ALARM display will appear again even after you have reset.
PM10U
EBARA
CORPORATION