EBARA EV-S50 - Control Signal Wiring

P.49
4.3.2 Control Signal Wiring
Connect wires to the control connector for remote operation and remote
monitoring.
Tables 4.6, 4.7, 4.8 and 4.9 and Figs. 4.6 and 4.7 show the pin assignment.
Table 4.6 Receptacle Specification
Connector No. Connector type
CN-Z
15 pin D sub-miniature Female receptacle
(In accordance with SEMI-E73)
CN-Y 25 pin D sub-miniature Female receptacle
PM10U
EBARA
CORPORATION