EBARA EV-S50 - List of Wastes During Maintenance; Overhaul

P.86
7.6 List of wastes during maintenance
Table 7.4 lists wastes from general user maintenance. Dispose the wastes
properly according to your local waste disposal regulations in each area.
Table 7.4 List of wastes during maintenance
Part Equipped on Remarks
Lubricant oil
Inside of pump module.
See section 7.3.
Refer to Appendix 1,2 for Material
Safety Data Sheet.
Lithium battery
CPU board.
(No necessary to replace at
usual maintenance.)
Refer to Appendix 3 for Material
Safety Data Sheet.
O-ring Connection of vacuum line Usual industrial waste.
7.7 Overhaul
Overhaul is performed in EBARA.
Contact EBARA Sales office or Overhaul service center.
Please overhaul once a year.
PM10U
EBARA
CORPORATION