（iv）
WARNING Check for gas leaks after installing and maintaining the piping.
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the ingress of air
into the pump. When checking for gas leaks by pressurization,
please pressurize by less than 0.05 MPa into the purge port and
do check.
WARNING Do not alter the pump member nor change any parts without the
EBARA's consent or approval.
WARNING The pump casing and exhaust piping become extremely hot
during operation and for some time after stopping.
Be sure that pump and exhaust piping do not come in contact
with humans or inflammable substances.
Do not remove the pump cover during operation.
WARNING Check Safety Interlock functions periodically (every 6 months) to
confirm the interlocks will work correctly.
CAUTION Disposal of process by-products shall be strictly in accordance
with all local and national environmental and safety regulations.
CAUTION Disposal of Printed circuit board containing Lithium battery shall
be strictly in accordance with all local and national environmental
and applicable regulations.
WARNING In designing the dry pumps, Ebara does not assume risks
caused by hazardous chemical reactions resulted from
simultaneous injection or mixture of multiple process gases in
the pumps, and the pump is not equipped with a protection
against the dangers from such pump usage. The tool suppliers
and users must pay attention not to simultaneously inject or mix
those gases.
PM10U
EBARA
CORPORATION
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