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EBARA EV-S50 - User Manual

EBARA EV-S50
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • T
    Terry GillAug 30, 2025
    What does 'WARN: CASING TEMP HIGH' mean on my EBARA EV-S50?
    • D
      Derek MartinAug 30, 2025
      If your EBARA Water Pump displays 'WARN: CASING TEMP HIGH', it could be due to a rise in pump back pressure, an increase in the gas load, accumulation of by-product, or reduced cooling water flow. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, or increase cooling water flow.
  • C
    Carl MirandaAug 29, 2025
    Why does nothing appear on the LCD of my EBARA EV-S50?
    • J
      Jerome OlsenAug 29, 2025
      If the LCD on your EBARA Water Pump shows nothing, it could be due to several reasons. First, check the power supply to ensure the pump is receiving power. Next, verify that the connector is properly connected. Also, make sure the CP is turned ON. Check the LCD’s connector to ensure that it is connected. If none of these steps resolve the issue, the instrument may have failed and need replacement.
  • M
    Michael HammondAug 28, 2025
    What causes 'ALARM: CASING TEMP H.HIGH' on my EBARA Water Pump?
    • A
      Amy BellAug 28, 2025
      If your EBARA Water Pump displays 'ALARM: CASING TEMP H.HIGH', the pump back pressure may be rising, there may be an increase in the gas load, cooling water flow may be reduced, or there may be an accumulation of by-products. Check the exhaust pipe, reduce the inflow gas amount, cool the pump thoroughly and reset it, or replace or overhaul the pump.
  • C
    christinaperezAug 27, 2025
    What does 'WARN: WATER FLOW LOW' mean on my EBARA EV-S50 Water Pump and how do I fix it?
    • D
      David DavisAug 27, 2025
      If the EBARA Water Pump displays 'WARN: WATER FLOW LOW', it could be due to several reasons: * Coupler is disconnected, so connect it. * Pressure is insufficient, so apply sufficient pressure. * Root valve is closed, so open the valve. * Water pipe is clogged, so clean or replace the piping. * Tube fittings are loosened, so re-tighten them. * Instrument failure, so replace the instrument. * Outlet & inlet pipes are reversed, so connect the pipes correctly.
  • A
    andrea60Aug 26, 2025
    Why is my EBARA EV-S50 making abnormal noises and vibrating excessively?
    • T
      thomasgriffinAug 27, 2025
      If your EBARA Water Pump is experiencing abnormal noise and excessive vibration, here are a few possible causes: * The adjustment feet may not be applied, so use them. * Some object might be making contact with the outer cover, so remove it. * The fastening screws of the outer cover may have worked themselves loose, so tighten them. * Parts of the pump may be damaged, requiring you to replace or overhaul the pump.
  • K
    Kathleen BurgessAug 25, 2025
    What to do if EBARA EV-S50 Water Pump shows ALARM: WATER FLOW LOW?
    • S
      Samuel MooreAug 26, 2025
      If the EBARA Water Pump displays 'ALARM: WATER FLOW LOW', several issues could be the cause. It might be that the coupler is disconnected, the pressure isn't sufficient, the root valve is closed, the water pipe is clogged, tube fittings are loosened, there's an instrument failure, or the outlet and inlet pipes are reversed. To resolve this: * Connect the coupler if disconnected. * Apply sufficient pressure. * Open the valve if it's closed. * Clean or replace the piping if clogged. * Re-tighten any loose tube fittings. * Replace the instrument if there is an instrument failure. * Connect pipes correctly if they are reversed.
  • C
    Cassandra BlairAug 25, 2025
    Why is the circuit protector activated on my EBARA Water Pump?
    • H
      Holly KennedyAug 25, 2025
      If the circuit protector is activated on your EBARA Water Pump, it could be due to incorrect wiring or a short circuit. Check the wiring first. If that's not the problem, the pump may have a short circuit, requiring replacement or overhaul.

Summary

Safety Information

Important Prior Warnings

Safety Interlocks

3. Product Description

3.4 Release and Shut Off Residual Internal Energy

Safety procedures for shutting off power and residual energy before maintenance.

4. Installation

4.2 Piping

Cautions and procedures for connecting vacuum, exhaust, water, and gas pipes.

4.3 Electrical Wiring

Procedures for connecting power supply and control signals to the pump.

5. LCD Controller

5.5 Starting;Stopping the Pump with the LCD Controller

Procedures for starting and stopping the pump using one or two LCD controllers.

6. Operation

6.1 Before Starting

Pre-operation checks for cooling water and N2 gas supply.

6.2 START;STOP

Procedures for starting and stopping the pump via local, remote, or communication interfaces.

7. Maintenance and Inspection

7.1 Internal Energies

Information on internal energies (power, water, gas) before starting maintenance.

8. Disconnection and Transportation

10. Troubleshooting

10.1 Troubleshooting (1) Basic Trouble

Table of common abnormal symptoms and their corrective actions.

10.2 Troubleshooting (2) WARNING

Troubleshooting guide for WARNING displays and associated symptoms.

10.3 Troubleshooting (3) ALARM

Troubleshooting guide for ALARM displays and associated symptoms.

EBARA EV-S50 Specifications

General IconGeneral
BrandEBARA
ModelEV-S50
CategoryWater Pump
LanguageEnglish

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