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EBARA EV-S100N - User Manual

EBARA EV-S100N
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • F
    Frederick WebbSep 12, 2025
    What does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA EV-S100N Water Pump?
    • K
      Kevin HarmonSep 12, 2025
      If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
  • S
    Sabrina ShermanSep 9, 2025
    What does 'ALARM: PHASE ERROR' mean on my EBARA Water Pump?
    • S
      Sabrina WilliamsSep 9, 2025
      If you're seeing 'ALARM: PHASE ERROR' on your EBARA Water Pump, it could be due to an open phase or incorrect wiring. Replace the instrument or check the power supply.
  • J
    Jaime HinesSep 8, 2025
    What does 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###' mean on my EBARA EV-S100N Water Pump?
    • B
      Brenda GonzalezSep 8, 2025
      If your EBARA Water Pump displays 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, the cooling water flow rate may be reduced or the motor driver has broken down. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, cool the pump thoroughly and reset, or replace the motor driver.
  • L
    Lisa KirkSep 7, 2025
    What does 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT' mean on my EBARA Water Pump?
    • B
      Brittany BaileySep 7, 2025
      If your EBARA Water Pump displays 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
  • G
    Gregory ScottAug 23, 2025
    What to do if my EBARA Water Pump shows 'ALARM: EMERGENCY STOP'?
    • A
      Andrea EstradaAug 23, 2025
      If the EBARA Water Pump displays 'ALARM: EMERGENCY STOP', it's likely due to the emergency stop switch being activated. Ensure the pump can be operated and turn the button head to release the lock.
  • T
    Thomas DawsonSep 5, 2025
    What does 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2' mean on my EBARA EV-S100N?
    • L
      Lauren BruceSep 5, 2025
      If your EBARA Water Pump displays 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe & silencer, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
  • D
    David CarpenterSep 4, 2025
    What to do if my EBARA EV-S100N MP does not start when entering external “MP start” signal input?
    • S
      Sarah ReedSep 4, 2025
      If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
  • J
    Jack PerrySep 3, 2025
    What does 'WARN: PUMP N2 FLOW LOW' mean on my EBARA EV-S100N Water Pump?
    • T
      Tracy ShannonSep 3, 2025
      If your EBARA Water Pump displays 'WARN: PUMP N2 FLOW LOW', it could be due to several reasons: the N2 port is not connected, the primary pressure is insufficient, the regulator setting value is too low, the N2 pipe is clogged or there are leaks on N2 pipe, or there is an instrument failure. Connect the N2 pipe fitting, apply sufficient pressure, increase the pressure setting, replace the N2 piping, check the fittings, or replace the instrument.
  • M
    mario10Sep 2, 2025
    What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA EV-S100N Water Pump?
    • B
      Bobby WilkinsSep 2, 2025
      If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.
  • M
    monica02Aug 31, 2025
    What to do if my EBARA EV-S100N Water Pump MP does not start when applying START button?
    • C
      Carrie WiseSep 1, 2025
      If the MP (Main Pump) on your EBARA Water Pump doesn't start when you press the START button, it might be because “Remote” or “COM” mode has been selected or start-up conditions are not satisfied. Alternatively, there could be an instrument failure. Set the switch to “Local” mode or satisfy all start-up conditions. If the problem persists, replace the instruments.

Summary

Environmental Basic Policies

Corporate Environmental Commitment

Discusses the company's commitment to environmental protection and management.

Safety Information

Hazard Level Definitions

Explains DANGER, WARNING, CAUTION, and NOTE terms for hazard levels.

Important Prior Warnings

Critical Safety Precautions

Key warnings for lifting, electrical work, gas handling, and general safety.

Safety Interlocks

Interlock Functionality

Explains the role of safety interlocks in protecting the pump and system.

Standard Limited Warranty

Warranty Terms and Conditions

Details duration, coverage, exclusions, and limitations of the product warranty.

Product Description

N2 Gas System Functionality

Explains the use of nitrogen gas for purging, dilution, and shaft sealing.

Control System Overview

Covers the built-in unit, sensors, monitoring, and alarm levels.

Release and Shut Off Residual Energy

Electrical Lockout;Tagout Procedures

Procedures for safely shutting off electrical power using lockout/tagout.

Cooling Water Shutoff and Disconnection

Steps to shut off and disconnect the cooling water supply safely.

Nitrogen (N2) Disconnection

Steps to shut off and disconnect the nitrogen gas supply safely.

Detailed Specifications

Model Specifications (EV-S20 Series)

Provides detailed specifications for EV-S20, EV-S20P, EV-S20N models.

Model Specifications (EV-S50 Series)

Provides detailed specifications for EV-S50, EV-S50P, EV-S50N models.

Model Specifications (EV-S100 Series)

Provides detailed specifications for EV-S100, EV-S100P, EV-S100N models.

Model Specifications (EV-S200 Series)

Provides detailed specifications for EV-S200, EV-S200P, EV-S200N models.

Installation Guidelines

Pump Movement and Fixation

Instructions for moving and fixing the pump, including location and caster use.

Piping Connections

Electrical Wiring Procedures

General Wiring Precautions

General warnings and precautions for electrical wiring work.

Power Supply and Control Wiring

Shows connector positions for power supply and control signals for different models.

Control Signal Connector Details

Details on control connector specifications and pin assignments.

Optional Emergency Stop Switch

Explains the function and system flow of the optional Emergency Stop Switch Box.

LCD Controller Interface

Setting Operational Modes via LCD

Instructions for setting various operational modes via the LCD controller.

Pump Start;Stop Control

Operation Procedures

Pre-Start Checks and N2 Gas

Pre-operation checks for cooling water and N2 gas supply.

Start;Stop Operations

Maintenance and Inspection

Internal Energy Considerations

Information on internal energies (power source, cooling water, N2 gas) before maintenance.

Lubricating Oil Supply

Steps for supplying lubricating oil if the level is low.

Disconnection and Transportation

Safety Procedures for Disconnection

Safety precautions and procedures for disconnecting the pump.

SEMI S2 Standard Requirements

Troubleshooting Guide

General Troubleshooting Warnings

General warnings before starting troubleshooting or maintenance.

Basic Troubleshooting Steps

Table of common abnormal symptoms and their corrective actions.

Troubleshooting WARNINGs

Table of WARNING symptoms and their corrective actions.

Troubleshooting ALARMs

Table of ALARM symptoms and their corrective actions.

Troubleshooting Optional Features

Table of optional troubleshooting symptoms and their corrective actions.

EBARA EV-S100N Specifications

General IconGeneral
ModelEV-S100N
CategoryWater Pump
TypeCentrifugal Pump
Maximum Flow Rate100 L/min
Maximum Head55 m
MaterialStainless Steel
Maximum Operating Pressure10 bar
Motor ProtectionIP55
Insulation ClassF
Material (Pump Body)Stainless Steel
Material (Impeller)Stainless Steel
Material (Shaft)Stainless Steel
Pumped LiquidClean Water
Outlet Connection1 1/4 inch
StagesSingle Stage

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