To Next PageTo Next PageWhat does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA EV-S200P?
If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
What does 'ALARM: PHASE ERROR' mean on my EBARA EV-S200P?
If you're seeing 'ALARM: PHASE ERROR' on your EBARA Water Pump, it could be due to an open phase or incorrect wiring. Replace the instrument or check the power supply.
What does 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###' mean on my EBARA Water Pump?
If your EBARA Water Pump displays 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, the cooling water flow rate may be reduced or the motor driver has broken down. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, cool the pump thoroughly and reset, or replace the motor driver.
What does 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT' mean on my EBARA EV-S200P Water Pump?
If your EBARA Water Pump displays 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
What to do if my EBARA EV-S200P shows 'ALARM: EMERGENCY STOP'?
If the EBARA Water Pump displays 'ALARM: EMERGENCY STOP', it's likely due to the emergency stop switch being activated. Ensure the pump can be operated and turn the button head to release the lock.
What does 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2' mean on my EBARA EV-S200P?
If your EBARA Water Pump displays 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe & silencer, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
What to do if my EBARA EV-S200P MP does not start when entering external “MP start” signal input?
If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
What does 'WARN: PUMP N2 FLOW LOW' mean on my EBARA Water Pump?
If your EBARA Water Pump displays 'WARN: PUMP N2 FLOW LOW', it could be due to several reasons: the N2 port is not connected, the primary pressure is insufficient, the regulator setting value is too low, the N2 pipe is clogged or there are leaks on N2 pipe, or there is an instrument failure. Connect the N2 pipe fitting, apply sufficient pressure, increase the pressure setting, replace the N2 piping, check the fittings, or replace the instrument.
What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA EV-S200P Water Pump?
If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.
What to do if my EBARA Water Pump MP does not start when applying START button?
If the MP (Main Pump) on your EBARA Water Pump doesn't start when you press the START button, it might be because “Remote” or “COM” mode has been selected or start-up conditions are not satisfied. Alternatively, there could be an instrument failure. Set the switch to “Local” mode or satisfy all start-up conditions. If the problem persists, replace the instruments.
EBARA's commitment to environmental protection and management.
Essential safety information, hazard level definitions, and important warnings.
Description of safety interlock mechanisms for pump protection.
Terms, coverage, and exclusions of the EBARA limited warranty.
Manufacturer's declaration of compliance with relevant EU directives.
Introduction to EBARA EV-S pumps and initial checks upon receipt.
Details on pump module, N2 gas, cooling, exhaust, and control systems.
Comprehensive technical specifications and model details for various EV-S series pumps.
Guidelines for relocating and securely installing the pump.
Instructions for connecting vacuum, exhaust, water, N2, and electrical systems.
Overview of the LCD controller, its buttons, and status indications.
How to configure control modes, running modes, speeds, and dip switches.
Steps for starting, stopping, and handling power failures.
Procedures for routine checks, internal energy handling, and lubrication.
Guidelines for safely disconnecting, purging, and transporting the pump.
Necessary electrical parts and conditions for SEMI S2 compliance.
Solutions for basic, warning, alarm, and option-related issues.
General| Model | EV-S200P |
|---|---|
| Category | Water Pump |
| Type | Submersible |
| Power | 200W |
| Voltage | 220V |
| Frequency | 50Hz |
| Max Flow Rate | 200L/min |
| Max Head | 8m |
| Outlet Diameter | 1 inch |
| Cable Length | 10m |
| Pump Type | Submersible |
