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EBARA EV-S200P - User Manual

EBARA EV-S200P
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • V
    Valerie LevineAug 30, 2025
    What does 'WARN: CASING TEMP HIGH' mean on my EBARA EV-S200P Water Pump?
    • S
      stephanie68Aug 31, 2025
      If your EBARA Water Pump displays 'WARN: CASING TEMP HIGH', it could be due to a rise in pump back pressure, an increase in the gas load, accumulation of by-product, or reduced cooling water flow. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, or increase cooling water flow.
  • T
    Troy BernardAug 29, 2025
    Why does nothing appear on the LCD of my EBARA EV-S200P?
    • J
      jose13Aug 29, 2025
      If the LCD on your EBARA Water Pump shows nothing, it could be due to several reasons. First, check the power supply to ensure the pump is receiving power. Next, verify that the connector is properly connected. Also, make sure the CP is turned ON. Check the LCD’s connector to ensure that it is connected. If none of these steps resolve the issue, the instrument may have failed and need replacement.
  • M
    Melinda BrownAug 28, 2025
    What causes 'ALARM: CASING TEMP H.HIGH' on my EBARA EV-S200P?
    • K
      knightdanielAug 28, 2025
      If your EBARA Water Pump displays 'ALARM: CASING TEMP H.HIGH', the pump back pressure may be rising, there may be an increase in the gas load, cooling water flow may be reduced, or there may be an accumulation of by-products. Check the exhaust pipe, reduce the inflow gas amount, cool the pump thoroughly and reset it, or replace or overhaul the pump.
  • M
    Mrs. Gabrielle Robertson MDAug 27, 2025
    What does 'WARN: WATER FLOW LOW' mean on my EBARA Water Pump and how do I fix it?
    • S
      Shannon DavisAug 27, 2025
      If the EBARA Water Pump displays 'WARN: WATER FLOW LOW', it could be due to several reasons: * Coupler is disconnected, so connect it. * Pressure is insufficient, so apply sufficient pressure. * Root valve is closed, so open the valve. * Water pipe is clogged, so clean or replace the piping. * Tube fittings are loosened, so re-tighten them. * Instrument failure, so replace the instrument. * Outlet & inlet pipes are reversed, so connect the pipes correctly.
  • K
    Krystal GallegosAug 27, 2025
    Why is my EBARA EV-S200P making abnormal noises and vibrating excessively?
    • G
      greendavidAug 27, 2025
      If your EBARA Water Pump is experiencing abnormal noise and excessive vibration, here are a few possible causes: * The adjustment feet may not be applied, so use them. * Some object might be making contact with the outer cover, so remove it. * The fastening screws of the outer cover may have worked themselves loose, so tighten them. * Parts of the pump may be damaged, requiring you to replace or overhaul the pump.
  • T
    theresa79Aug 25, 2025
    What to do if EBARA Water Pump shows ALARM: WATER FLOW LOW?
    • J
      Julie ZimmermanAug 26, 2025
      If the EBARA Water Pump displays 'ALARM: WATER FLOW LOW', several issues could be the cause. It might be that the coupler is disconnected, the pressure isn't sufficient, the root valve is closed, the water pipe is clogged, tube fittings are loosened, there's an instrument failure, or the outlet and inlet pipes are reversed. To resolve this: * Connect the coupler if disconnected. * Apply sufficient pressure. * Open the valve if it's closed. * Clean or replace the piping if clogged. * Re-tighten any loose tube fittings. * Replace the instrument if there is an instrument failure. * Connect pipes correctly if they are reversed.
  • B
    brittneygarciaAug 25, 2025
    Why is the circuit protector activated on my EBARA EV-S200P Water Pump?
    • C
      Christopher RamirezAug 25, 2025
      If the circuit protector is activated on your EBARA Water Pump, it could be due to incorrect wiring or a short circuit. Check the wiring first. If that's not the problem, the pump may have a short circuit, requiring replacement or overhaul.

Summary

Safety and Policy Information

Environmental Basic Policies

EBARA's commitment to environmental protection and management.

General Safety Guidelines

Essential safety information, hazard level definitions, and important warnings.

Safety Interlocks

Description of safety interlock mechanisms for pump protection.

Standard Limited Warranty

Terms, coverage, and exclusions of the EBARA limited warranty.

EC Declaration of Conformity

Manufacturer's declaration of compliance with relevant EU directives.

Product Overview and Specifications

Foreword and Introduction

Introduction to EBARA EV-S pumps and initial checks upon receipt.

Product Description

Details on pump module, N2 gas, cooling, exhaust, and control systems.

Detailed Specifications

Comprehensive technical specifications and model details for various EV-S series pumps.

Installation and Wiring

Pump Movement and Fixation

Guidelines for relocating and securely installing the pump.

Piping and Electrical Connections

Instructions for connecting vacuum, exhaust, water, N2, and electrical systems.

Control and Operation

LCD Controller Interface

Overview of the LCD controller, its buttons, and status indications.

Operational Modes and Settings

How to configure control modes, running modes, speeds, and dip switches.

Pump Operation Procedures

Steps for starting, stopping, and handling power failures.

Maintenance, Transportation, and Troubleshooting

Maintenance and Inspection

Procedures for routine checks, internal energy handling, and lubrication.

Disconnection and Transportation

Guidelines for safely disconnecting, purging, and transporting the pump.

SEMI S2 Standard Requirements

Necessary electrical parts and conditions for SEMI S2 compliance.

Troubleshooting Guide

Solutions for basic, warning, alarm, and option-related issues.

EBARA EV-S200P Specifications

General IconGeneral
ModelEV-S200P
CategoryWater Pump
TypeSubmersible
Power200W
Voltage220V
Frequency50Hz
Max Flow Rate200L/min
Max Head8m
Outlet Diameter1 inch
Cable Length10m
Pump TypeSubmersible

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