EBARA ESA70W - User Manual

EBARA
Corporation
ESA70_STD_2_E_Rev.0
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA70W
MODEL ESA70WN
STANDARD MODEL
200V（50Hz）、200-220V（60Hz）
Caution:
Please read and understand this INSTRUCTION MANUAL thoroughly
before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
※「Model ООО」 in this INSTRUCTION MANUAL is our model code
ISSUED BY PRECISION MACHINERY GROUP

Summary

Safety Information

Important Prior Warnings

Critical safety precautions and warnings before operating the pump.

Safety Warning Labels

Explains various safety warning labels attached to the pump covers.

Installation

4.1 Movement and Fixation

Covers pump placement, location requirements, and leveling.

4.2 Piping

Details on connecting vacuum, exhaust, cooling water, and N2 gas lines.

4.3 Electrical Wiring

Operation

7.1 Before Starting

Pre-operation checks and procedures for cooling water and N2 gas.

7.2 START;STOP

Details on starting and stopping the pump using various methods.

Maintenance and Inspection

8.1 Internal Energies

8.2 Routine Inspection

8.3 Vacuum and Exhaust Piping Maintenance

8.4 Lubricant Oil

8.7 Overhaul

Disconnection and Transportation

Troubleshooting

10.1 Basic Troubleshooting

Addresses common issues and their solutions.

10.2 WARNING Troubleshooting

Solutions for warning conditions displayed by the pump.

10.3 ALARM Troubleshooting

Solutions for alarm conditions displayed by the pump.

10.4 Option Troubleshooting

Troubleshooting for optional features or specific alarms.

EBARA ESA70W Specifications

General

Model	ESA70W
Power	0.75 kW
Voltage	220-240 V
Frequency	50/60 Hz
Phase	Single Phase
Material	Cast Iron
Type	Submersible Pump
Discharge Size	2 inches
Outlet Size	2 inches