EBARA ESA70WN - User Manual

EBARA
Corporation
ESA70_STD_2_E_Rev.0
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA70W
MODEL ESA70WN
STANDARD MODEL
200V（50Hz）、200-220V（60Hz）
Caution:
Please read and understand this INSTRUCTION MANUAL thoroughly
before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
※「Model ООО」 in this INSTRUCTION MANUAL is our model code
ISSUED BY PRECISION MACHINERY GROUP

Summary

Safety Information

Important Prior Warnings

High temperature warning

Warning about hot surfaces causing burns; allow cooling before servicing.

Hazardous voltage warning

Warning about hazardous voltage causing shock, injury, or death; disconnect power.

Hazardous materials warning

Warning for handling hazardous materials; use N2 purge and PPE.

Electric charge mark

Indicates potential for electric charge, requiring caution.

Hazardous weight danger

Warning about heavy weight causing injury or death from falling/tipping.

High temperature eyebolt warning

Warning about hot eyebolts causing burns; allow cooling before servicing.

Product Description

3.2 Control System

Details the pump's built-in measuring unit and control circuit.

3.4 Detailed Specifications

Installation

4.2 Piping

4.3 Electrical Wiring

Operation

7.1 Before Starting

Steps to perform before starting the pump, including checks for water and N2 gas.

7.2 START;STOP

Procedures for starting and stopping the pump, including local, remote, and communication methods.

Maintenance and Inspection

8.1 Internal energies

8.2 Routine Inspection

8.3 Vacuum and Exhaust Piping

8.4 Lubricant Oil

Disconnection and Transportation

Troubleshooting

10.1 Troubleshooting (1) Basic trouble

Common issues, check items, and corrective actions for basic pump problems.

10.2 Troubleshooting (2) WARNING

Troubleshooting steps for WARNING signals, focusing on safety and operational checks.

10.3 Troubleshooting (3) ALARM

Troubleshooting steps for ALARM signals, emphasizing safety and system integrity.

10.4 Troubleshooting (4) Option

EBARA ESA70WN Specifications

General

Model	ESA70WN
Power	0.75 kW
Voltage	220-240 V
Frequency	50 Hz
Outlet	1 inch
Outlet Size	1 inch
Material	Stainless Steel