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EBARA ESA25-D - User Manual

EBARA ESA25-D
89 pages
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PM40U
EBARA
CORPORATION
ESA25_CSN_D_E_Rev.0
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA25-D
CE / SEMI / NRTL MODEL
200V(50Hz),200-220V(60Hz)
380-400V(50Hz),380-440V(60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY

Questions and Answers

Summary

Safety Information

Hazard Level Definitions

Explains DANGER, WARNING, CAUTION symbols and their meanings.

Critical Pre-Operation Warnings

Essential safety precautions and warnings before pump operation.

Warning Label Identification

Describes important safety labels attached to the pump.

Safety Interlock Functions

Details on the pump's safety interlock systems and their operation.

Product Description

System Overview

General description of the pump's design and key features.

Pump Module Details

Information on the Roots type vacuum pump mechanism.

Nitrogen Gas System

Functionality and use of the N2 gas supply for dilution and sealing.

Cooling Water System

Description of the pump's cooling water circuit and connections.

Control System and Alarms

Overview of monitoring, control, and alarm signals.

Installation Procedures

Site Selection and Preparation

Guidelines for choosing an appropriate installation location.

Pump Movement and Fixation

Procedures for moving and securely fixing the pump.

Piping Connections

Instructions for vacuum, exhaust, and N2 piping connections.

Electrical Wiring Requirements

Guidelines for electrical connections and safety.

Voltage Configuration

Steps for changing pump voltage settings via wiring and switches.

Operation and Control

LCD Controller Interface

Overview of the control panel, buttons, and display.

Operational Mode Settings

How to set control and operational modes via the LCD.

Starting and Stopping the Pump

Procedures for starting, stopping, and pre-operation checks.

Local and Remote Control

Operating the pump locally via controller and remotely.

Maintenance and Troubleshooting

Maintenance Precautions

Safety measures and considerations before performing maintenance.

Routine Inspection Checklist

Recommended periodic checks and their intervals.

Lubricant Oil Procedures

Managing the pump's lubricating oil level and replacement.

Troubleshooting Common Issues

Diagnosing and resolving basic operational problems.

Warning and Alarm Resolution

Steps to address warning and alarm signals.

EBARA ESA25-D Specifications

General IconGeneral
ModelESA25-D
Voltage220-240 V
Power0.25 kW
PhaseSingle Phase
Frequency50 Hz
Outlet Diameter25 mm
Inlet25 mm
Outlet25 mm
MaterialCast Iron

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