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EBARA ESA25-D - User Manual

EBARA ESA25-D
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PM40U
EBARA
CORPORATION
ESA25_CSN_D_E_Rev.0
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA25-D
CE / SEMI / NRTL MODEL
200V(50Hz),200-220V(60Hz)
380-400V(50Hz),380-440V(60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY

Questions and Answers

  • S
    Steven AustinSep 9, 2025
    Why does the fuse open on my EBARA ESA25-D?
    • A
      audrey26Sep 9, 2025
      If the EBARA Water Pump's fuse opens, it could be due to: * Incorrect wiring: Check the wiring. * Short circuit: Replace or overhaul the pump. * Wrong input voltage: Check the power supply voltage.
  • J
    jeremiah95Aug 23, 2025
    What causes 'ALARM: MP CASING TEMP HIGH' on EBARA Water Pump and how to fix it?
    • J
      James HernandezAug 23, 2025
      If the EBARA Water Pump displays 'ALARM: MP CASING TEMP HIGH', it could be due to several reasons: * Insufficient ventilation: Ensure sufficient ventilation. * Rising pump back pressure: Check the exhaust pipe and silencer. * Increased gas load: Reduce the inflow gas amount. * Reduced cooling water flow: Cool the pump thoroughly and reset it. * Accumulation of by-products: Replace or overhaul the pump.
  • K
    Kathy BuckleyAug 25, 2025
    Why EBARA ESA25-D Water Pump displays 'WARN: MP CASING TEMP HIGH'?
    • J
      Jeff JonesAug 26, 2025
      If the EBARA Water Pump displays 'WARN: MP CASING TEMP HIGH', it may be caused by: * Insufficient duct ventilation: Ensure sufficient ventilation. * Rising pump back pressure: Check the exhaust pipe. * Increased gas load: Reduce the inflow gas amount. * Accumulation of by-product: Replace or overhaul the pump. * Reduced cooling water flow: Increase cooling water flow.
  • J
    Johnny KingAug 26, 2025
    What does 'ALARM: MP MOTOR TEMP H.HIGH' mean on my EBARA Water Pump?
    • S
      simmonslarryAug 27, 2025
      If the EBARA Water Pump displays 'ALARM: MP MOTOR TEMP H.HIGH', it could be due to: * Reduced cooling water flow: Cool the pump thoroughly and reset it. * Motor failure: Replace or overhaul the pump. * Open phase: Check the wiring.
  • E
    elliottbriannaAug 28, 2025
    What to do for 'WARN: PUMP N2 FLOW LOW' on EBARA ESA25-D?
    • M
      Mr. Caleb PachecoAug 28, 2025
      If the EBARA Water Pump displays 'WARN: PUMP N2 FLOW LOW', it could be due to: * The N port not being connected: Connect the N pipe fitting. * Insufficient primary pressure: Apply sufficient pressure. * A low regulator setting value: Increase the pressure setting. * A clogged N pipe: Replace the N piping. * Leaks on the N pipe: Check the fittings. If none of these steps resolve the issue, the instrument may have failed and require replacement.
  • I
    itaylorAug 29, 2025
    Why EBARA ESA25-D Water Pump MP does not start when applying START button?
    • C
      Christopher DavidsonAug 29, 2025
      If the EBARA Water Pump's motor does not start when you press the START button, it might be because: * The “Remote” mode is selected: Set the switch to “Local” mode. * The start-up conditions are not met (Startfail is displayed): Satisfy all start-up conditions. If neither of these solutions works, the instrument may have failed and require replacement.
  • A
    Austin RodriguezSep 18, 2025
    What does 'ALARM: IO COMM.ERROR' mean on EBARA ESA25-D Water Pump?
    • A
      Andrew GarciaSep 18, 2025
      If the EBARA Water Pump displays 'ALARM: IO COMM.ERROR', it may be caused by: * A connection error of the instrumented units: Check the connection of the instrumented unit. If the problem persists, the instrument may have failed and require replacement.
  • C
    Cameron SnowSep 19, 2025
    What does 'ALARM: EXT. INTERLOCK' mean on my EBARA Water Pump?
    • A
      Amber LeeSep 22, 2025
      If the EBARA Water Pump displays 'ALARM: EXT. INTERLOCK', it means that the external interlock is effective. Check the external interlock signal.
  • K
    Katelyn MaciasSep 8, 2025
    What causes reverse rotation in EBARA ESA25-D Water Pump?
    • A
      Angela BridgesSep 8, 2025
      If the EBARA Water Pump is experiencing reverse rotation, it is likely due to incorrect wiring. Check the wiring to correct this issue.
  • O
    odennisSep 4, 2025
    What does 'ALARM: BACK PRESS HIGH' mean on my EBARA ESA25-D Water Pump?
    • A
      Ashley LopezSep 4, 2025
      If the EBARA Water Pump displays 'ALARM: BACK PRESS HIGH', it may be due to: * A closed exhaust valve: Check the exhaust pipe. If this does not resolve the issue, the instrument may have failed and require replacement.

Summary

Safety Information

Hazard Level Definitions

Explains DANGER, WARNING, CAUTION symbols and their meanings.

Critical Pre-Operation Warnings

Essential safety precautions and warnings before pump operation.

Warning Label Identification

Describes important safety labels attached to the pump.

Safety Interlock Functions

Details on the pump's safety interlock systems and their operation.

Product Description

System Overview

General description of the pump's design and key features.

Pump Module Details

Information on the Roots type vacuum pump mechanism.

Nitrogen Gas System

Functionality and use of the N2 gas supply for dilution and sealing.

Cooling Water System

Description of the pump's cooling water circuit and connections.

Control System and Alarms

Overview of monitoring, control, and alarm signals.

Installation Procedures

Site Selection and Preparation

Guidelines for choosing an appropriate installation location.

Pump Movement and Fixation

Procedures for moving and securely fixing the pump.

Piping Connections

Instructions for vacuum, exhaust, and N2 piping connections.

Electrical Wiring Requirements

Guidelines for electrical connections and safety.

Voltage Configuration

Steps for changing pump voltage settings via wiring and switches.

Operation and Control

LCD Controller Interface

Overview of the control panel, buttons, and display.

Operational Mode Settings

How to set control and operational modes via the LCD.

Starting and Stopping the Pump

Procedures for starting, stopping, and pre-operation checks.

Local and Remote Control

Operating the pump locally via controller and remotely.

Maintenance and Troubleshooting

Maintenance Precautions

Safety measures and considerations before performing maintenance.

Routine Inspection Checklist

Recommended periodic checks and their intervals.

Lubricant Oil Procedures

Managing the pump's lubricating oil level and replacement.

Troubleshooting Common Issues

Diagnosing and resolving basic operational problems.

Warning and Alarm Resolution

Steps to address warning and alarm signals.

EBARA ESA25-D Specifications

General IconGeneral
ModelESA25-D
Voltage220-240 V
Power0.25 kW
PhaseSingle Phase
Frequency50 Hz
Outlet Diameter25 mm
Inlet25 mm
Outlet25 mm
MaterialCast Iron

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