PM40U
EBARA
CORPORATION
ESA25_CSN_D_E_Rev.0
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA25-D
CE / SEMI / NRTL MODEL
200V(50Hz),200-220V(60Hz)
380-400V(50Hz),380-440V(60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
「Model ООО」 in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY