P.55
PM10U
EBARA
CORPORATION
8.2 Routine Inspection
Check periodically that ALARM signal is not output on the LCD controller or
remote output.
Table 8.1 Typical check items
No. Item Sensor
Interval
(recommended)
１
Motor Current
Current
Transformer
2 N2 Gas Flow Flow sensor
3 Vibration / Noise -----
4 Cooling water flow Flow sensor
5 Pump casing Temp. Thermo- Couple
Every 1 week
6 Color / level of lubricant oil ----- Every 1 month
When the WARNING/ALARM display appears, take action in accordance with
Section 10. "Troubleshooting."
If the lubrication oil amount is lower than the lower limit line of the oil level gauge,
supply the lubrication oil. See the Section 8.3 “Lubrication oil“ when adding the
oil.
WARNING Switch off the power supply to the pump first and interrupt the
Circuit Breaker (CB) and lockout before you start on
maintenance.
WARNING The pump and exhaust piping will remain at a high
temperature during operation and for a short time after the
pump has stopped.
Be sure to avoid contact and keep inflammable substances out
of reach.
Do not remove the outer cover during operation.
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