P.22
PM10U
EBARA
CORPORATION
4.3.3 Control Signal Wiring
This pump is equipped with signal input and output connectors, which allow
external tools and control devices to remotely operate and monitor the pumps.
Connect wires to the control connector for remote operation and remote
monitoring. Tables 4.4 , 4.5 , 4.6 and 4.7 and Figs. 4.5 and 4.6 show the pin
assignment.
The pumps also have an Emergency Off (EMO) input connector for user error
monitoring device, such as a gas leak sensor to monitor the in-box gas leakage,
to receive its error detection output for pump emergency stop. Refer to section
4.3.4 of this manual for EMO input.
Table 4.4 Receptacle Specification
Connector No. Connector type
CN-Z
15 pin D sub-miniature Female receptacle
(In accordance with SEMI E73)
CN-Y 25 pin D sub-miniature Female receptacle
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