EBARA ESA200W - Page 42

P.23
PM10U
EBARA
CORPORATION
Fig. 4.5
15 Pin D Sub-Miniature Female Receptacle
(As seen from connecting side)
Table 4.5 Control Connector Pin Assignment(CN-Z)
Pin. No. Signal name I/O Signal type
1 MP START (+) IN
Run：CLOSE, Alternate
2 BP START (+) IN
Run：CLOSE, Alternate
3 MP START STATUS (+) OUT
Run：CLOSE, Alternate
4 BP START STATUS (+) OUT
Run：CLOSE, Alternate
5 WARNING STATUS (+) OUT
WARNING：OPEN, Alternate
6 ALARM STATUS (+) OUT
ALARM：OPEN, Alternate
7 REMOTE STATUS (+) OUT
REMOTE：CLOSE
8 −
9 MP START (−)
10 BP START (−)
11 MP START STATUS (−)
12 BP START STATUS (−)
13 WARNING STATUS (−)
14 ALARM STATUS (−)
15 REMOTE STATUS (−)
18
15 9
Screw lock size : M2.6
Contact pin surface : Au