P.24
PM10U
EBARA
CORPORATION
Fig. 4.6
25 Pin D Sub-Miniature Female Receptacle
(As seen from connecting side)
Table 4.6 Control Connector Pin Assignment(CN-Y)
Pin No. Signal name I/O Signal type
1 RESET (+) IN RESET：CLOSE
2 LOW SPEED CONTROL (+) IN LOW SPEED：CLOSE, Alternate
3 RESERVED (+) IN
4 RESERVED (+) IN
5 RESERVED (+) IN
6 EMO STATUS (+) OUT Abnormality：OPEN, Alternate
7 PUMP N2 WARNING STATUS (+) OUT Abnormality：CLOSE, Alternate ※1
8 RESERVED (+) OUT
9 LOW SPEED CONTROL (+) OUT LOW SPEED：CLOSE, Alternate
10 RESERVED (+) OUT
11 RESERVED (+) OUT
12 RESERVED (+) OUT
13 −
14 RESET (−)
15 SAVING ENERGY CONTROL (−)
16 RESERVED (−)
17 RESERVED (−)
18 RESERVED (−)
19 EMO STATUS (−)
20 PUMP N2 WARNING STATUS (−)
21 RESERVED (−)
22 SAVING ENERGY STATUS (−)
23 RESERVED (−)
24 RESERVED (−)
25 RESERVED (−)
※1 It can change to “Abnormality：OPEN, Alternate“ by DIP SW. setting.
113
25 14
Screw lock size : M2.6
Contact pin surface : Au
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