EBARA ESA200W - Wastes During Maintenance

P.62
PM10U
EBARA
CORPORATION
Table. 8.3 Labels
Label’s Name Parts No.
[DANGER] HAZARDOUS WEIGHT DANGER LABEL
C-7110-316-0001
[WARNING] HAZARDOUS VOLTAGE WARNING LABEL
C-7110-313-0001
[WARNING]
HAZARDOUS VOLTAGE AFTER EMO
WARNING LABEL
C-7110-410-0001
[WARNING] HIGH TEMPERATURE WARNING LABEL
C-7110-312-0001
[WARNING] HAZARDOUS MATERIAL WARNING LABEL
C-7110-314-0001
[WARNING]
ANTI EARTHQUAKE FIXTURE WARNING
LABEL
C-7110-322-0001
8.6 List of wastes during maintenance
Table 8.4 lists wastes from general user maintenance. Dispose the wastes
properly according to your local waste disposal regulations in each area.
Table 8.4 List of wastes during maintenance
Part Equipped on Remarks
Lubricant oil
Inside of pump module.
See section 8.4.
Refer to Appendix 2 for Material
Safety Data Sheet.
Lithium battery
CPU board.
(No necessary to replace at
usual maintenance.)
Refer to Appendix 3 for Material
Safety Data Sheet.
O-ring Connection of vacuum line Usual industrial waste.