P.58
PM10U
EBARA
CORPORATION
(2) When an exhaust gas scrubber unit is used, close the inlet valve of the
exhaust gas scrubber after the N2 gas purge has been discontinued and then
remove the piping.
(3) Be sure to switch off the power supply.
(4) After you have washed the piping do not reconnect until it has dried
completely.
8.4 Lubricant Oil
CAUTION Do not start filling oil until the interior pump pressure has
reached atmospheric pressure. The chamber containing the oil
is under low pressure (vacuum) so that a significant leak will
occur causing substantial damage to the pump when the
oil-filling plug is removed with the pump operating.
CAUTION Waste oil shall be disposed of by industrial waste disposal
dealer in accordance with Material Safety Data sheets.
(Appendix 2)
If the oil level is lower than the lower limit line of the oil level gauge in daily
inspection and maintenance, it is necessary to supply oil.
Follow the steps below to supply oil.
(1) Stop the pump and remove the outer side cover on the pump. (See Fig. 8.1)
Fig. 8.1 How to remove pump covers
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