P.27
PM10U
EBARA
CORPORATION
4.3.4 Additional Emergency Off (EMO) input
In addition to the emergency off button, which stops the pump and interrupts all
primary voltage outside the main control panel, pump has a connector for an
“emergency” signal input. The user may place this connector in any external
interlock circuit (e.g. scrubber failure, gas leak detection, EMO “daisy chain”).
Any break in this external circuit will shut down the pump.
Additional EMO input connector “EXT. IO” is located on front panel. Refer to
outline drawing shown in section 3.5. (Near signal connector port.)
CAUTION Dummy plug should be connected on “EXT.IO” receptacle
during operation. Pump does not run without dummy plug,
because it means same as EMO signal was input.
Table 4.8 Additional EMO input Specification
Plug HIROSE DF1B-2EP-2.5RC
Pin HIROSE DF1-PD2428SCB
Suitable wire size UL1007 AWG#24
Required capacity of user side facility DC12V 20mA added by pump side.
NO voltage required from outside
Signal input at NORMAL condition Close between two pins of the plug
Signal input at EMERGENCY condition Open between two pins of the plug
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