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EBARA ESA200W - User Manual

EBARA ESA200W
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PM40U
EBARA
CORPORATION
ESA200_CSN_2_E_Rev. 0
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA200W
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО in this INSTRUCTION MANUAL is our model code
ISSUED BY PRECISION MACHINERY COMPANY

Questions and Answers

  • C
    Connie HudsonSep 9, 2025
    Why is my EBARA ESA200W Water Pump's MP not starting when I press the START button?
    • S
      sruizSep 9, 2025
      If your EBARA Water Pump's MP does not start when applying the START button, it could be because: * “Remote” mode has been selected, so set the switch to “Local” mode. * Start-up conditions are not satisfied, and “Startfail” is displayed, so satisfy all start-up conditions. Alternatively, it could be due to instrument failure, so replace the instrument.
  • N
    nhillSep 8, 2025
    What does it mean if nothing appears on the LCD of my EBARA Water Pump?
    • D
      dwrightSep 8, 2025
      If nothing appears on the LCD of your EBARA Water Pump, it could be due to: * CB is not ON, so place CB to ON. * Disconnection of the LCD’s connector, so connect LCD’s connector. Alternatively, it could be due to instrument failure, so replace instruments.
  • S
    Sandra BrownSep 7, 2025
    What to do if my EBARA ESA200W displays 'ALARM: WATER LEAKAGE'?
    • M
      muellerjesusSep 7, 2025
      If your EBARA Water Pump displays 'ALARM: WATER LEAKAGE', it could be due to: * Tube fittings are loosened, so re-tighten them. Alternatively, the instrument might have failed, so replace the instrument.
  • T
    Thomas CarlsonAug 22, 2025
    Why is the circuit breaker activated on my EBARA Water Pump?
    • S
      Susan HansonAug 22, 2025
      The circuit breaker might be activated due to incorrect wiring. In this case, check the wiring. Alternatively, a short circuit could be the cause. If a short circuit is the problem, consider replacing or overhauling the pump.
  • K
    kenneth48Sep 4, 2025
    What does it mean if the power LED does not come on for my EBARA ESA200W Water Pump?
    • U
      urobertsonSep 5, 2025
      If the power LED does not come on, it could be due to: * No power supply to pump, so check the power supply. * The connector is not connected, so connect the power connector. * The CB is not ON, so place CB to ON.
  • U
    urobertsonSep 3, 2025
    What does 'ALARM: PHASE ERROR' mean on my EBARA Water Pump and how to fix it?
    • A
      Amanda LamSep 3, 2025
      The 'ALARM: PHASE ERROR' on your EBARA Water Pump indicates either an open phase, in which case there is an instrument failure, or incorrect wiring, so check the power supply.
  • S
    Sara CoffeySep 2, 2025
    What should I do if my EBARA ESA200W displays 'ALARM: BP MOTOR STEP OUT'?
    • K
      Kimberly FarrellSep 2, 2025
      If your EBARA Water Pump displays 'ALARM: BP MOTOR STEP OUT', it could be due to several reasons: * Pump back pressure rises, so check exhaust pipe. * Increase of the gas load, so reduce the inflow gas amount. * Rotor makes contact (Accumulation of by-products) (Substance plunge), so replace or overhaul pump. Alternatively, the instrument might have failed, so replace the instrument.
  • M
    mark78Sep 1, 2025
    What causes vacuum pressure increase in my EBARA ESA200W Water Pump?
    • M
      Mario FloydSep 1, 2025
      An increase in vacuum pressure in your EBARA Water Pump could be due to: * Accumulation of by-products in pipes, so clean the piping. * High N2 pressure setting, so set the pressure for the correct value. * Leaks from vacuum piping, so check the piping. Alternatively, accumulation of by-products in the pumps may be the cause, so replace or overhaul the pump.
  • Y
    Yolanda JonesAug 31, 2025
    How to troubleshoot 'ALARM: BP DRIVER ###' error on my EBARA Water Pump?
    • K
      Keith TaylorAug 31, 2025
      To troubleshoot the 'ALARM: BP DRIVER ###' error on your EBARA Water Pump, consider the following possible causes: * Insufficient ventilation, so ventilate sufficiently. * Pump back pressure rises, so check exhaust pipe. * Increase of the gas load, so reduce the inflow gas amount. * Rotor makes contact (Accumulation of by-products) (Substance plunge), so replace or overhaul pump. * Cooling water flow rate is reduced, so cool pump thoroughly and reset. Alternatively, the motor driver may have broken down, so replace the motor driver.
  • M
    Michael SmithAug 29, 2025
    Why does my EBARA ESA200W Water Pump show 'WARN: CASING TEMP HIGH'?
    • I
      isaiahcalhounAug 30, 2025
      If your EBARA Water Pump shows 'WARN: CASING TEMP HIGH', it could be due to several reasons: * Insufficient duct ventilation, so ventilate sufficiently. * Pump back pressure rises, so check the exhaust pipe. * Increase of the gas load, so reduce the inflow gas amount. * Accumulation of by-product, so replace or overhaul the pump. * Cooling water flow is reduced, so increase cooling water flow.

Summary

Environmental Basic Policies

Safety Information

Hazard Level Definitions

Defines DANGER, WARNING, and CAUTION symbols and their meanings.

Important Prior Warnings

Safety Interlocks

Standard Limited Warranty

EC Declaration of Conformity

Foreword

Introduction

Environmental Concerns

Guidelines for handling and maintaining the unit to minimize environmental impact.

Product Description

Pump Module and Utilities

Overview of pump module, N2 gas, cooling water, and exhaust systems.

Cooling Water and Exhaust

Control System

Warning and Alarm Signals

Explanation of the pump protection system's warning and alarm signals.

Operation Status Control

Pump Moving Procedures

Preparation and Moving Method

Steps for preparing and safely moving the pump unit.

Utility Disconnection

Electrical Power Lockout;Tagout

Procedure for safely shutting off and locking electrical power.

Cooling Water and Nitrogen Disconnection

Returning to Service

Detailed Specifications

Installation

Location and Fixation

Guidelines for selecting installation location and securing the pump.

Piping Connections

Vacuum and Exhaust Piping

Instructions for connecting vacuum and exhaust pipes to the pump.

Cooling Water Piping

N2 Gas Piping

Ventilation Duct

Electrical Wiring

Grounding and Power Supply

Procedures for electrical grounding and connecting the power supply.

Control Signal Wiring

Additional Emergency Off (EMO) Input

Power Supply for Accessories

LCD Controller

LCD Outline and Controls

Description of the LCD controller's physical layout and buttons.

LCD Indication Details

Setting Operational Modes

Operational Mode Setting Screen

Overview of the screen for setting operational modes.

Setting Pump Control and DIP Switch

Setting Running Modes and Speeds

Dip Switch Settings

DIP Switch Setting Display

LCD Controller Start;Stop Operation

Operation

Before Starting Procedures

Essential checks and actions before starting the pump.

Start;Stop Procedures

Local and Remote Start;Stop

Maintenance and Inspection

Internal Energies and Supplies

Information on power source, cooling water, and nitrogen gas.

Routine Inspection

Vacuum and Exhaust Piping Maintenance

Lubricant Oil Management

Spare Parts List

Wastes During Maintenance

Pump Overhaul Procedures

Disconnection and Transportation

Troubleshooting

Basic Trouble Diagnosis

Guidance for identifying and resolving basic operational issues.

Warning Troubleshooting

Alarm Troubleshooting

Option Troubleshooting

EBARA ESA200W Specifications

General IconGeneral
ModelESA200W
Power200W
Voltage220-240V
Cable Length10 m
Frequency50Hz
MaterialPlastic

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