P.47
PM10U
EBARA
CORPORATION
7. Operation
7.1 Before Starting
(1) Turn on the cooling water supply and check that there are no leaks at the
pipe connections.
CAUTION Without sufficient cooling water, the pump temperature will rise
and problems such as rotor contact will occur.
[ NOTE ] The pump unit itself has no cooling water flow adjustment valve.
(2) Turn on the N2 gas supply.
Check that the regulator attached to the pump is closed. (It is closed when
the pressure adjustment knob is fully turned in the counterclockwise
direction.) Open the main valve and check that there are no N2 gas leaks
from the pipe connections.
Slowly turn the pressure adjustment knob clockwise to set the pressure
(gauge pressure) to 0.1 MPa first. Then press the red stopper to lock the
knob in position.
WARNING Be sure to purge with N2 gas in order to prevent corrosion and
reduce the formation/deposition of reaction by-products in the
pump. When inflammable and/or toxic gases are diluted with
N2 to the safe concentration, be sure to maintain a separate
supply of N2 gas to the pump exhaust pipe.
CAUTION Abrupt rotation of the pressure adjustment knob will cause the
pressure indicator needle of the regulator to wobble and result
in an inaccurate pressure display.
CAUTION Unless a sufficient supply of N2 gas is maintained, serious
problems will occur such as oil back flow or pump corrosion
and accretion of reaction by-products.
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