（iii）
PM10U
EBARA
CORPORATION
Important Prior Warnings
DANGER Keep out from under the pump when lifted.
Only qualified personnel shall unload and lift the pump.
WARNING Be careful not to overturn the pump when pushing and pulling it
sideways, because the width of the pump is small to its height.
WARNING All electrical works must be performed by only a qualified
electrician.
All national and local electrical regulations must be observed.
WARNING Interrupt Circuit Breaker (CB) before starting on wiring
and maintenance work.
Do not switch on the power supply to the pump until work is
completed.
WARNING Supply N2 gas to the exhaust piping when necessary to dilute
the inflammable or toxic gas up to a safe concentration.
WARNING Purge with sufficient N2 gas before removing and washing the
vacuum and exhaust piping.
Do not let inflammable, toxic or dangerous materials
disperse and guard against contact with the human body.
Always work in a location with an escape route in an emergency.
WARNING Do not use the pump for another process without a previous
overhaul. Gases or reaction products remaining in the pump will
react and lead to accidents with the formation of large amounts of
products.
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