EBARA ESA200W - Page 30

P.11
PM10U
EBARA
CORPORATION
Check
Valve
Power
Gas Inlet
Control Circuit
Gas Outlet
Pum
p
N2 Gas Flow Sensor
N2 Selector Valve
Pressure Gau
g
e
P
Re
g
ulator
N2 Gas
Motor Starter 1
Motor 1
Main Pum
p
（ＭＰ）
Motor Starter 2
Control
Connector
Circuit Breaker
LCD Controller
Cooling Water Flow Sensor
Water
FT2
FT1
Booster Pum
p
（ＢＰ）
Motor 2
Driver 2
Silencer
Fig. 3.2 System Flow