（v）
PM10U
EBARA
CORPORATION
WARNING In designing the dry pumps, Ebara does not assume risks
caused by hazardous chemical reactions resulted from
simultaneous injection or mixture of multiple process gases in
the pumps, and the pump is not equipped with a protection
against the dangers from such pump usage. The tool
suppliers and users must pay attention not to simultaneously
inject or mix those gases.
WARNING Do not perform a withstand voltage test.
Failure to comply could result in damage to the sensitive
devices.
CAUTION Never operate the pump without pump cover for safety.
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