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EBARA ESA200W
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P.60
PM10U
EBARA
CORPORATION
(5) Fit a waste oil container (PVC bag) to the bottom of the oil drain hole of the
secondary reservoir and remove the drain plug. (See Fig.8.2)
(6) When you have drained off the waste oil close the drain hole after you have
checked that there are no depositions and fragments adhering to the O ring
attached to the plug.
(7) Please check the air leak after supplying lubricant oil.
Fig. 8.3 Oil Level Gauge
CAUTION Be sure to use the lubricant oils listed in specification table 3.1
only.
CAUTION When the lubrication oil level exceeds the upper limit, the oil
may leak to the pump side. Thus, be sure not to exceed the
upper limit line when adding the oil. Except Booster pump
gear side.
CAUTION When the lubrication oil level is lower than the lower limit line,
serious failure may be caused. If you find out the shortage,
add the oil immediately.
Lower limit
Upper limit

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