P.69
PM10U
EBARA
CORPORATION
Display Symptom Check Item Corrective Action
Coupler is disconnected. Connect coupler.
Pressure is not sufficient. Apply sufficient pressure.
Root valve is closed. Open valve.
Water pipe is clogged. Clean or replace piping.
Tube fittings are loosened. Re-tighten.
Instrument failure Replace instrument.
WARN: WATER
FLOW LOW ##.#
Water flow is reduced.
Outlet & inlet pipes are
reverse. (flow value 0 L/min)
Connect pipes correctly.
N2 port is not connected. Connect N2 pipe fitting.
Primary pressure is
insufficient.
Apply sufficient pressure.
Regulator setting value
LOW.
Increase pressure setting.
N2 pipe is clogged. Replace N2 piping.
Leaks on N2 pipe. Check the fittings.
WARN: PUMP N2
FLOW LOW
Pump N2 flow is
reduced.
Instrument failure Replace instrument.
Duct ventilation insufficient Ventilate sufficiently.
Pump back pressure rises. Check exhaust pipe
Increase of the gas load. Reduce the inflow gas
amount.
Accumulation of by-product Replace or overhaul pump.
WARN: CASING
TEMP HIGH
Casing temperature
rises.
Cooling water flow is
reduced.
Increase cooling water flow.
WARN: BP MOTOR
TEMP HIGH
WARN: MP MOTOR
TEMP HIGH
Booster Pump (BP)
motor coil temp.
rises.
Main pump (MP)
motor coil temp.
rises.
Cooling water flow is
reduced.
Cool pump thoroughly and
reset.
Duct ventilation insufficient Ventilate sufficiently. WARN: BP DRIVER
TEMP HIGH #####
Booster Pump (BP)
driver temp. rises.
Cooling water flow is
reduced.
Increase cooling water flow.
Connection error of the
instrumented units
Check the connection of the
instrumented unit.
WARN:
## COMM.ERROR
Communication is not
established.
Instrument failure Replace instrument.
Duct ventilation not
sufficient
Ventilate sufficiently. ALARM: PUMP BOX
TEMP HIGH
Temp. rises in pump
cover.
Cooling water flow is
reduced.
Increase cooling water flow.
After you have taken the remedial actions above, reset the pump. If the problem
that has caused the WARNING signal still remains, the WARNING display will
appear again even after you have reset.
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