P.71
PM10U
EBARA
CORPORATION
Display Symptom Check Item Corrective Action
Coupler is disconnected. Connect coupler.
Pressure is not sufficient. Apply sufficient
pressure.
Root valve is closed. Open valve.
Water pipe is clogged. Clean or replace piping.
Tube fittings are loosened. Re-tighten.
Instrument failure Replace instrument.
ALARM: WATER
FLOW LOW
Water flow is reduced.
Outlet & inlet pipes are
reverse. (flow value 0 L/min)
Connect pipes correctly.
Insufficient ventilation Ventilate sufficiently
Pump back press. rises. Check exhaust pipe &
silencer.
Increase of the gas load. Reduce the inflow gas
amount.
Cooling water flow is
reduced.
Cool pump thoroughly
and reset.
ALARM: CASING
TEMP H.HIGH
Pump casing temp.
rises.
Accumulation of
by-products
Replace or overhaul
pump.
Cooling water flow is
reduced.
Cool pump thoroughly
and reset.
ALARM:BP MOTOR
TEMP H.HIGH
ALARM:MP MOTOR
TEMP H.HIGH
Booster Pump (BP)
motor coil temp.
rises.
Main Pump (MP)
motor coil temp.
rises.
Motor failure Replace or overhaul
pump.
Pump back press. rises. Check exhaust pipe &
silencer.
Increase of the gas load. Reduce the inflow gas
amount.
Rotor makes contact.
(Accumulation of
by-products)
(Substance plunge)
Replace or overhaul
pump.
Open phase Loss of the phase in
power source
ALARM:BP MOTOR
OVERLOAD
ALARM:MP MOTOR
OVERLOAD
BP motor current
rises. (thermal relay
trip)
MP motor current
rises. (thermal relay
trip)
Instrument failure Replace instrument.
Pump back press. rises. Check exhaust pipe.
Increase of the gas load. Reduce the inflow gas
amount.
Rotor makes contact.
(Accumulation of
by-products)
(Substance plunge)
Replace or overhaul
pump.
ALARM:BP MOTOR
STEP OUT
Booster Pump (BP)
motor step out
Can not restart
Instrument failure Replace instrument.
ALARM :MP MOTOR
NO CURRENT
MP motor current
value is 0.
Instruments are in failure. Replace instruments.
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