Edwards APGX-H User Manual

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Contents
D023-92-880 Issue F
Contents
Section Page
1 Introduction ....................................................................................... 1
1.1 Scope and definitions ................................................................................................... 1
1.2 Description ................................................................................................................ 1
1.3 Gas dependency .......................................................................................................... 2
2 Technical Data .................................................................................... 5
2.1 Mechanical data .......................................................................................................... 5
2.2 Performance, operating and storage conditions .................................................................... 5
2.3 Electrical data ............................................................................................................ 5
2.4 Materials exposed to vacuum .......................................................................................... 6
3 Installation ......................................................................................... 7
3.1 Unpack and inspect ...................................................................................................... 7
3.2 Fit the APGX-H to a system ............................................................................................ 7
3.3 Electrical connections ................................................................................................... 8
3.3.1 Connect to an Edwards AGC, TIC or AGD display ................................................................... 8
3.3.2 Connect to your own supply and control equipment ............................................................... 8
4 Operation ........................................................................................ 11
4.1 Pressure measurement .................................................................................................11
4.2 Set-point adjustment ...................................................................................................11
4.3 Error monitoring ........................................................................................................12
5 Maintenance ..................................................................................... 15
5.1 Atmosphere and vacuum adjustment ................................................................................15
5.1.1 Atmosphere adjustment ...............................................................................................15
5.1.2 Vacuum adjustment ....................................................................................................15
5.1.3 Atmosphere adjustment at pressures other than 1000 mbar (750 Torr) .......................................15
5.1.4 Reset factory calibration values ......................................................................................16
5.2 Clean the filter ..........................................................................................................16
5.3 Replacing the tube .....................................................................................................16
5.4 Fault finding .............................................................................................................17
5.5 Calibration service ......................................................................................................17
6 Storage and Disposal ........................................................................... 19
6.1 Storage ...................................................................................................................19
6.2 Disposal ...................................................................................................................19
7 Spares and Accessories ........................................................................ 21
7.1 Introduction .............................................................................................................21
7.2 Spares .....................................................................................................................21
7.3 Accessories ...............................................................................................................21
For return of equipment, complete the HS Forms at the end of this manual.
cg/7692/10/18

Edwards APGX-H Specifications

General

Brand	Edwards
Model	APGX-H
Category	Measuring Instruments
Language	English