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APGX-H
Edwards APGX-H User Manual
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© Edwards Limited 20
18. All
rights reserved.
Page 3
Edwards and th
e Edwards logo
are trademar
ks of Edwards
Limited.
Introduction
D023-92-880 I
ssue F
Figure 1 - General V
iew of the APGX-H (NW16 APGX-H Shown)
1.
Cable connector plug
2.
APGX-H connector socket
3.
Filter retaining circlip
4.
V
acuum flange
5.
Sinter
ed filter
8
1
A
2
A
1
3
4
5
8
10
Table of Contents
Table of Contents
5
Introduction
7
Scope and Definitions
7
Description
7
Gas Dependency
8
General View of the APGX-H (NW16 APGX-H Shown)
9
Technical Data
11
Mechanical Data
11
Performance, Operating and Storage Conditions
11
Electrical Data
11
Materials Exposed to Vacuum
12
Dimensions (MM) NW16 APGX-H Shown)
12
Installation
13
Unpack and Inspect
13
Fit the APGX-H to a System
13
Electrical Connections
14
Connect to an Edwards AGC, TIC or AGD Display
14
Connect to Your Own Supply and Control Equipment
14
Schematic Diagram of Recommended Electrical Connection
15
Operation
17
Pressure Measurement
17
Set-Point Adjustment
17
Pressure-Voltage Characteristics of the APGX-H
17
Error Monitoring
18
Adjust the APGX-H
19
Maintenance
21
Atmosphere and Vacuum Adjustment
21
Atmosphere Adjustment
21
Vacuum Adjustment
21
Atmosphere Adjustment at Pressures Other than 1000 Mbar (750 Torr)
21
Reset Factory Calibration Values
22
Clean the Filter
22
Replacing the Tube
22
Fault Finding
23
Calibration Service
23
Replace the APGX-H Tube
23
Storage and Disposal
25
Storage
25
Disposal
25
Spares and Accessories
27
Introduction
27
Spares
27
Accessories
27
4
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Edwards APGX-H Specifications
General
Brand
Edwards
Model
APGX-H
Category
Measuring Instruments
Language
English
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