Safety
3.2
These accessories have been designed for installation and use on the Edwards AUTO 306
vacuum coater with its comprehensive safety features. If you install and use them on any
other equipment, you must take suitable safety precautions to ensure that you adequately
support, safely enclose, insulate, interlock and provide short circuit protection, as
appropriate.
All installation work must be done by a suitably trained and supervised person.
Switch off the electrical supply and disconnect the coating system from the electrical supply
before you start installation work.
Surfaces inside the AUTO 306 can be very hot or very cold. Ensure that you take adequate
precautions to avoid touching hot or cold surfaces such as the pump body, source holders,
substrates and components associated with Plasmaglo and other HT discharge processes.
Full details of the procedure for opening the AUTO 306 cabinet are given in the instruction
manual for the A UTO 306. Follow these instructions carefully to prevent damage to
components such as the chamber leak valve.
3.3
General installation requirements
Note the points listed below when you install the Water Cooled Crystal Holder:
Locate the crystal head in a definite, reproducible position relative to the source and the
substrate, preferably at the same distance as the substrate from the source. The distance that
you place the crystal head from the source is important; the mass of the deposited layer on
a given area of the crystal is inversely proportional to the square of the distance from the
source. If you increase the distance, the mass of deposited layer on a given area of the crystal
will decrease.
Mount the crystal face at right angles to the line-of-sight of the source. The effective area of
the crystal exposed to the source is proportional to the cosine of the angle of inddence of the
source.
.
AlJowa smalJ amount of adjusb1)ent for the crystal head for when you to set-up the system.
Position the crystal head so that you can remove and insert the crystal
Securely support the electrical cables and cooling-water hoses.
8
Water Cooled Crystal Holder
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