17. If you will fit an Oscillator Unit inside the AUTO 306 cabinet, refer to Section 3.5. Otherwise,
re-connect the electrical supply.
Install into other coating units
You should use the procedure in Section 3.4.1. Note, however, that if your coating unit does not
have 8 mm external diameter cooling-water hoses, you may have to use the riffled connectors
to connect your water hoses to the bottom of the lead through.
3.5
How to install the Oscillator Unit
Connect the Oscillator Unit between the Water Cooled Crystal Holder and your film thickness
monitor (for example, your FTM5) as shown in Figure 2.
Ensure that the Oscillator Unit is correctly orientated, with:
the short co-axial cable (2) between the crystal sensor (1) and the Oscillator Unit connector
marked XTAL
the long co-axial cable (5) between the film thickness monitor and the Oscillator Unit
connector marked FTM5.
Support the Oscillator Unit to prevent strain on the electrical connectors.
How to prepare and install a crystal into the crystal head
Remove and replace the crystal in a clean environment; use an isolated, clean work bench if
possible. To prevent contamination of the crystal, use clean laboratory gloves or plastic tweezers.
Keep new crystals in a closed plastic case.
You may prepare the crystal for use by depositing a thin layer(forexarnple, l000A)of aluminium
on it. Install the crystal into the crystal head and follow the instructions in the instruction manual
for your film thickness monitor. If you prepare the crystal in this way, it will ensure that the
monitoring system is functioning correctly. It also covers the exposed part of the crystal with a
metal which is readily dissolved; this then allows subsequent deposits to be removed more
easily.
Refer to Figure 4. The crystal (4) is fitted into the crystal head (2). To remove the crystal and fit
a new one, use the procedure below:
1. Pull the enclosure (3) straight out of the crystal head (2) by gripping its edges between your
thumb and forefinger .
2. Shake or tap out the used crystal.
3.
Place a new crystal (4) in the enclosure (3); check that the front of the crystal is facing out of
the aperture (see Figure 5, insets A and B to identify the front and rear of the crystal).
4. Ensure that the crystal (4) is correctly seated in the centre of the enclosure (3).
Water Cooled Crystal Holder
13
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