D135-10-880C - Maintenance
Page 93
Exhaust oil filter
After using the ELD500 for a longer time there can be oil accumulated from the pump. Do the
following:
1. Switch off the ELD500.
2. Remove the mechanical cover according to Opening of the ELD500.
3. The oil filter is located besides the rotary vane pump.
4. Unscrew the plexiglas cabinet (direction is shown by an arrow on the filter).
5. Clean or replace the filter (xxxxxxxxxx)
6. Screw back the plexiglas cabinet hand tight.
7. Check the oil level of the wet pump and fill it up when necessary (contact Edwards for
more details).
8. Finally re-install the cover for the mechanical section.
Turbomolecular pump
For the turbomolecular pump it is recommended to change the bearings after 20,000 running
hours. For details, contact the local Edwards service hub.
Calibrated leak TL7
The Calibrated leak CL internal with the helium reservoir is used for alignment of the mass
spectrometer in the ELD500 as well as for calibration the leak rate indication.
It is equipped with a solenoid valve which is actuated via the control electronics of the
ELD500.
Technical data
Factory inspection
Calibrated leaks are not subject to wear and the Helium loss of the calibrated leak TL7, being
less than 2% per year, is negligible. Nevertheless, the leak rate may change over years due to
external influences. A factory inspection is, therefore, advisable once a year.
A test certificate, if required for the Helium calibrated leak, can be obtained from Edwards.
In that case, the calibrated leak should be forwarded and will be returned inspected and
recertified with the test certificate against charge.
The helium flow stated on the main label is the actual leak rate of the calibrated leak.
Nominal calibration range 10 to 7 mbar l/s
Tolerance of nominal calibration range +/- 15%
Temperature coefficient < 0.5%/°C
Leak type Capillary
Filling Helium
To Next Page
Loading...
