D135-10-880C - Description
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Vacuum diagram ELD500 DRY
The ELD500 DRY has a diaphragm pump as fore vacuum pump, making it suitable for
applications where oil sealed systems can not be used. Furthermore the ELD500 DRY contains
one more valve, the valve 4b. This valve opens step by step to regulate the inlet pressure into
the turbo pump.
Figure 3 Vacuum diagram ELD500 DRY
1. MS: Mass Spectrometer, Helium sensor (180° magnetic field mass spectrometer)
2. Turbo molecular pump (TMP, provides high vacuum conditions in the MS)
3. Pirani gauge P2 (fore vacuum pressure)
4. Diaphragm pump (provides the fore vacuum pressure for the TMP and pumps
down the parts under test)
5. Inlet Port
6. Pirani gauge P1 (inlet pressure)
V1 to V7: Electromagnetic Valves to control the gas flows
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