EasyManua.ls Logo

Edwards EXC120

Edwards EXC120
54 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
© Edwards Limited 2008. All rights reserved. Page iii
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
D396-14-880 Issue J
Illustrations
Figure Page
1 EXC120 Controller front panel ......................................................................................... 4
2 EXC300/300M Controller front panel ................................................................................. 5
3 Rear panel of the EXC120 Controller ................................................................................13
4 Rear panel of the EXC120E Controller ...............................................................................14
5 Rear panel of the EXC300/300M Controller .........................................................................15
6 EXC120, EXC300 and EXC300M Controller dimensions (mm) .....................................................20
7 EXC120E Controller dimensions (mm) ...............................................................................21
8 Schematic diagram of EXC120 & EXC120E Controller electrical connections .................................25
9 Schematic diagram of EXC300 & EXC300M Controller electrical connections .................................26
10 Direct operation of the backing pump ...............................................................................29
11 Operation of the backing pump through a contactor .............................................................29
12 Top cover of the Controller ...........................................................................................31
13 Hours counter (EXC300 only) ..........................................................................................35
14 EXC120/120E/300 Controller to EXT pump connections ..........................................................45
15 EXC300M Controller to EXT pump connections .....................................................................46
16 Active Gauge connector ...............................................................................................46
Tables
Table Page
1 Operating and storage conditions ....................................................................................17
2 Mechanical data .........................................................................................................17
3 Logic interface electrical data .......................................................................................17
4 Fuse ratings ..............................................................................................................17
5 Controllers electrical and other technical data ....................................................................18
6 Electrical connectors data ............................................................................................19
7 Factory settings .........................................................................................................19
8 Checklist of items .......................................................................................................23
9 Logic interface pins ....................................................................................................24
10 Selection of vent-valve control options .............................................................................32
11 Active Gauge connector pins ..........................................................................................46
Associated publications
Publication title Publication number
EXT Pump Accessories B580-66-880
EXT70 and EXT250 Turbomolecular pumps B722-01-880
EXT351 and EXT501 Turbomolecular Pumps B727-20-880
EXT250M Turbomolecular Pump B735-01-880

Table of Contents

Related product manuals