Edwards EXT255H Series - Typical Pumping System with an Ext70 Hi or Ext255 Hi Pump

© Edwards Limited 2008. All rights reserved. Page 17
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Installation
B722-20-880 Issue D
Figure 5 - Typical pumping system with an EXT70Hi or EXT255Hi pump
1. Vacuum chamber 1
2. High-vacuum gauge
3. Vibration isolator
4. Inlet-screen
5. EXT pump
6. Not used
7. Vacuum gauge
8. Flexible bellows
9. Foreline trap
10. Rotary backing-pump
11. Mist filter
12. Cooling-water connectors
13. EXDC drive module
14. Air-cooler
15. PRX10 purge restrictor
*
16. Regulated purge gas supply
*
17. Vent-valve
18. Alternative position for vent-valve
19. Vacuum chamber 2
20. Inlet-strainer
21. Interstage-port
*
EXT255Hi only