9600 Compressor Installation, Operation, and Maintenance
P/N 8040540 6
Table of Contents (continued)
Appendix A - Customer Support Information
Appendix B - Flow Diagram
Appendix C - Troubleshooting Procedures
Appendix D - Schematic
Figures
Figure 1-1: 9600 Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Figure 1-2: 9600 Compressor Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Figure 1-3: Water Flow Rate versus Pressure Drop . . . . . . . . . . . . . . . . . . . . . 1-6
Figure 1-4: 9600 Compressor Rear View Component Locations . . . . . . . . . . . 1-8
Figure 1-5: 9600 Compressor Connected to Multiple On-Board Cryopumps . 1-12
Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps 1-13
Figure 2-1: Using the Shipping Carton Ramp . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Figure 3-1: 9600 Compressor Installation Flowchart . . . . . . . . . . . . . . . . . . . . 3-2
Figure 3-2: 9600 Compressor Circuit Breaker Terminals (Cover Removed) . . 3-5
Figure 3-3: Connecting/Disconnecting Helium Flex Line Self
Sealing Couplings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Figure 3-4: Single On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . 3-9
Figure 3-5: Single Cryo-Torr Cryopump Installation . . . . . . . . . . . . . . . . . . . 3-10
Figure 3-6: Recommended Multiple On-Board Cryopump or
Waterpump Installation (Splitter Box located at Process Tool) . . 3-12
Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation
(Splitter Box located at Compressor) . . . . . . . . . . . . . . . . . . . . . . . 3-13
Figure 3-8: Recommended Multiple Cryo-Torr Cryopump Installation . . . . . 3-15
Figure 3-9: Alternative Multiple Cryo-Torr Cryopump Installation . . . . . . . . 3-16
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