9600 Compressor Installation, Operation, and Maintenance
7 P/N 8040540
Table of Contents (continued)
Figure 5-1: Disconnecting Self Sealing Couplings . . . . . . . . . . . . . . . . . . . . . . 5-2
Figure 5-2: Adsorber Location within the 9600 Compressor
(Rear Panel Removed) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Figure 5-3: 9600 Compressor Helium Pressure Control Components . . . . . . . 5-4
Figure B-1: 9600 Compressor Flow Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . B-1
Figure D-1:9600 Motor Drive Compressor Schematic . . . . . . . . . . . . . . . . . . . D-2
Tables
Table 1-1: Compressor Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-2: Electrical Input Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-3: Cooling Water Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Table 1-4: General Compressor Operating Specifications . . . . . . . . . . . . . . . . 1-7
Table 1-5: Cryopump Electrical Outlet Pin Assignments . . . . . . . . . . . . . . . . 1-10
Table 1-6: Compressor Remote Connector Pin Assignments . . . . . . . . . . . . . 1-11
Table 4-1: 9600 Compressor Helium Static Charge . . . . . . . . . . . . . . . . . . . . . 4-1
Table 5-1: Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Table C-1: Compressor Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . C-2
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