Inficon XL3000flex - Short Instruction

5 | Settings INFICON
12 / 14 XL3000flex-short-instruction-jima83en1-02-(1910)
Leak rate unit interface
Selecting the leak rate unit of the interfaces for sniff
0 mbar l/s (factory setting)
1 Pa m3/s
2 atm cc/s
3 Torr l/s
4 ppm
5 g/a
6 oz/yr
Control unit Settings > Set up > Interfaces > Units (interface) > Leak rate unit
SNIF
LD protocol Command 432 (sniffing)
ASCII protocol Command *CONFig:UNIT:LRSnif
Select gas type
The machine, calibration and sniff factor are dependent on the configured mass and
are saved in the mass spectrometer module.
2
3
4
H
2
(Hydrogen, forming gas)
3
He or deuterated hydrogen (HD)
4
He (Helium) (factory setting)
Control unit Main menu > Settings > Mass
LD protocol Command 506 with value 2 (3, 4)
ASCII protocol Command *CONFig:MASS 2 (3, 4)