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Leica EM ACE600 User Manual

Leica EM ACE600
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Leica EM ACE600
Operating Manual
167202032 Version 06/15

Table of Contents

Questions and Answers:

Leica EM ACE600 Specifications

General IconGeneral
TypeHigh Vacuum Coating System
Weight80 kg (approximate, without pumps)
ApplicationSample preparation for electron microscopy
Coating MethodSputtering
Coating TechniquesCarbon coating
Coating MaterialsGold, platinum, carbon, chromium
Target MaterialDepends on the coating material used
Maximum Sample SizeUp to 100 mm
Chamber Size200 mm diameter
Vacuum SystemTurbo molecular pump
Operating Pressure10^-6 mbar
Control SystemMicroprocessor-controlled
Sample StageRotatable and adjustable
Thickness MonitoringQuartz crystal monitor
Gas Flow ControlMass flow controller
Dimensions (W x D x H)600 x 500 x 500 mm

Summary

1. Introduction

1.1 Safety

Safety precautions for operation, maintenance, installation, and emergency procedures.

2. Installation and Setup

2.2 Installation Requirements

Workspace needs, workbench size, electrical/gas connections, and vacuum hygiene.

3. Operation

3.1 Touch Screen Control Panel

Explains the LCD control panel for system communication, data input/output, and process parameter editing.

3.2 Pump and Vent

Procedures for pumping down the system to vacuum and venting it, with status indicators.

3.6 Thickness Monitoring and Geometrical Correction (QSG)

Explanation of the QSG system for measuring film thickness and its role in process termination.

3.7 Carbon Thread Coating

Details on performing carbon thread coating, including pulse/flash modes and material recommendations.

3.8 Sputter Coating

Explanation of the magnetron sputter coating process, targets, and argon gas supply requirements.

4. Maintenance and Service

5. Troubleshooting

Troubleshooting Common Errors

Lists common error messages, their possible causes, and remedies for vacuum, shutter, quartz, and sputtering issues.

5.1 Error Messages

Detailed list of system, HiVac controller, and carbon thread controller error codes, titles, messages, and descriptions.

Leica EM ACE600 Technical Data

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