Troubleshooting
51
GA 05.139/1.02 - 06/99
Warning Message
on Display
TMS
TMS temperature sensor
reads a temperature higher
than the TMS setpoint +5 °C.
Unbalanc. PVW13
Unbalanc. PVW24
Unbalanc. PZ12
A rotor displacement excee-
ding the warning threshold
occured. The code designa-
tes the affected axis.
Overload
The rotational speed drop-
ped below normal operation
frequency.
Mains down
The converter is in the gene-
rator mode.
Op. Without Purge
The warning indicates that a
C/CT type of pump is opera-
ted while the purge gas
valve is closed.
Protection
The pump drive is blocked.
PK Communication
Converter does not commu-
nicate with the memory chip
inside of the pump.
Measures
Apply cooling water according to specificati-
ons. Check cooling water tubes for deposits.
See also Section 2.6.
Check the TMS setpoint (default 62 °C). For
the correct setting refer to Section 4.3.4.
Check chamber temperature.
If the red LED at the water valve is on dis-
connnect and connect the connector. The
valve must make noises. If not contact Ley-
bold.
If warning message persists contact Leybold
service.
Check the chamber pressure during operati-
on.
Contact Leybold service.
Reduce backing pressure. Additionally,
check process gas flow.
Set parameter „Normal Operation“ to default
95%. Refer also to Section 4.3.3.
Reconnect converter to the mains.
Switch on the converter.
Set purge gas function to Purge ON. (Key
panel or control connector X14).
Deactivate „Emergency off“ via control plug
X14.
Check BEARING connector and cable for
damages or bent pins. Contact Leybold ser-
vice if the cable is damaged.
Contact Leybold service.
Possible Cause
Cooling water flow too low or cooling water
temperature too high.
Wrong TMS temperature setpoint.
Temperature at the high-vacuum connection
flange or at the isolation valve is much
higher than 85 °C.
Water valve malfunction.
Mechanical shocks, perhaps due to tool
maintenance.
Shock venting.
Converter failure.
Backing pressure too high during operation.
Parameters „Normal Operation“ are not set
correctly.
Mains interrupted or converter switched off
during operation of the pump.
Purge gas function disabled.
Emergency off active.
BEARING cable damaged.
Memory chip inside of magnetic bearing car-
tridge malfunctioning.
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