Troubleshooting
53
GA 05.139/1.02 - 06/99
Failure Message on
Display
Bearing Temp.
Temperature sensor inside
the pump reads a higher
temperature value than the
failure threshold (76 °C).
Converter Temp.
Temperature sensor inside of
the converter reads a higher
temperature value than the
failure threshold (90 °C).
Overload PZ 12
Overload PV 13
Overload PW 24
An abnormal displacement
of the rotor occured at fre-
quencies between 0 and 5
Hz. The code designates the
affected axis.
Measures
Apply cooling water according to specifications.
Check cooling water tubes for deposits. See also
Section 2.6.
Allow pump to cool down between the cycles.
Step 1: Check pump (temperature sensor)
Check pump connector X23. In particular measure
resistance between pins X23/v and X23/u as well
as between pins X23/v and X23/t. The resistance is
typically between 110 Ω and 130 Ω (20 °C to 70
°C). In case abnormal values are measured contact
Leybold service.
Step 2: Check BEARING cable
If step 1 was successful do the following:
Check BEARING cable for bent pins
Measure the resistance between pins X20/v and
X20/u as well as between pins X20/v and X20/t
with the cable connected to the pump. The resi-
stance is typically between 110 Ω and 130 Ω (20
°C to 70 °C).
Replace the cable if it is damaged or in case the
measurement of the resistance shows abnormal
values now.
Check chamber temperature.
If the red LED at the water valve is on disconnnect
and connect the connector. The valve must make
noises. If not contact Leybold.
Contact Leybold service.
Allow converter to cool down between the cycles.
Refer to Section 2.8 for the correct mounting of the
converter in a rack; max. ambient temperature 45
°C.
Contact Leybold service.
Acknowledge failure message and restart the
pump. If failure message persists contact Leybold
service.
Remove transport seal; see Section 2.4.
Check BEARING connector and cable for bent
pins. Contact Leybold service if the cable is dama-
ged.
Possible Cause
Cooling water flow too low or cooling
water temperature too high.
Frequent acceleration and decelerati-
on of the pump.
Pt 100 (temperature sensor bearing)
damaged.
BEARING cable or connectors dama-
ged.
Temperature at the high-vacuum
connection flange or at the isolation
valve is much higher than 85 °C.
Water valve malfunction.
Converter failure.
Frequent acceleration and decelerati-
on of the pump.
No sufficient air circulation.
Converter failure.
Mechanical shocks, possibly due to
tool maintenance whwn the rotor
stands still.
Pump is still protected with transport
seal on power up.
BEARING cable or connector dama-
ged.
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